(19)
(11) EP 1 967 616 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
02.10.2013 Bulletin 2013/40

(45) Mention of the grant of the patent:
28.08.2013 Bulletin 2013/35

(21) Application number: 07023950.4

(22) Date of filing: 11.12.2007
(51) International Patent Classification (IPC): 
C25D 11/18(2006.01)

(54)

Microstructure and method of manufacturing the same

Mikrostruktur und Herstellungsverfahren dafür

Microstructure et procédé de fabrication correspondant

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

(30) Priority: 21.02.2007 JP 2007040811

(43) Date of publication of application:
10.09.2008 Bulletin 2008/37

(73) Proprietor: FUJIFILM Corporation
Minato-ku Tokyo (JP)

(72) Inventors:
  • Hatanaka, Yusuke
    Haibara-gun Shizuoka (JP)
  • Hotta, Yoshinori
    Haibara-gun Shizuoka (JP)

(74) Representative: HOFFMANN EITLE 
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München
81925 München (DE)


(56) References cited: : 
EP-A- 0 216 543
EP-A- 1 715 085
US-A- 3 488 262
 EP-A- 0 363 138
GB-A- 2 158 098
US-A1- 2006 049 059
   
  • WANG X ET AL: "Fabrication and characterization of anodic aluminum oxide template" MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 66, no. 1-4, 1 April 2003 (2003-04-01), pages 166-170, XP004421513 ISSN: 0167-9317
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).