ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIRO..CY..TRBGCZEEHUPLSK....IS..MT..........................JDIM360 Ver 2.40 (30 Jan 2013) - 2999001/01967616CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120131002W172deBibliographieenBibliographyfrBibliographieEP07023950.4200712112008121820121123enenen200704081120070221JP2013100220134020080910200837201308282013352013032220131002201340C25D 11/18 20060101AFI20080618BHEP deMikrostruktur und Herstellungsverfahren dafürenMicrostructure and method of manufacturing the samefrMicrostructure et procédé de fabrication correspondantEP-A- 0 216 543EP-A- 0 363 138EP-A- 1 715 085GB-A- 2 158 098US-A- 3 488 262US-A1- 2006 049 059WANG X ET AL: "Fabrication and characterization of anodic aluminum oxide template" MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 66, no. 1-4, 1 April 2003 (2003-04-01), pages 166-170, XP004421513 ISSN: 0167-9317Hatanaka, Yusukec/o Fujifilm Corporation 4000 Kawashiri Yoshida-choHaibara-gun ShizuokaJPHotta, Yoshinoric/o Fujifilm Corporation 4000 Kawashiri Yoshida-choHaibara-gun ShizuokaJPFUJIFILM Corporation100828495125 489 a/fha26-30, Nishiazabu 2-chomeMinato-ku TokyoJPHOFFMANN EITLE100061036Patent- und Rechtsanwälte Arabellastrasse 481925 MünchenDEATBEBGCHCYCZDEDKEEESFIFRGBGRHUIEISITLILTLULVMCMTNLPLPTROSESISKTR20080910200837