(19)
(11) EP 1 973 177 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
21.01.2015 Bulletin 2015/04

(45) Mention of the grant of the patent:
01.10.2014 Bulletin 2014/40

(21) Application number: 08005206.1

(22) Date of filing: 19.03.2008
(51) International Patent Classification (IPC): 
H01L 41/187(2006.01)
C23C 14/08(2006.01)
 H01L 41/316(2013.01)
B41J 2/14(2006.01)

(54)

Ferroelectric film, process for producing the same, ferroelectric device, and liquid discharge device

Ferroelektrischer Film, Herstellungsverfahren dafür, ferroelektrische Vorrichtung und Flüssigkeitsausstossvorrichtung

Film ferroélectrique, son procédé de production, dispositif ferroélectrique et dispositif de décharge de liquide

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 22.03.2007 JP 2007074026
05.09.2007 JP 2007229786
05.09.2007 JP 2007229787
05.09.2007 JP 2007229788
05.09.2007 JP 2007229789

(43) Date of publication of application:
24.09.2008 Bulletin 2008/39

(73) Proprietor: FUJIFILM Corporation
Minato-ku Tokyo (JP)

(72) Inventors:
  • Arakawa, Takami
    Kanagawa-ken (JP)
  • Fujii, Takamichi
    Kanagawa-ken (JP)

(74) Representative: Klunker . Schmitt-Nilson . Hirsch 
Patentanwälte Destouchesstraße 68
80796 München
80796 München (DE)


(56) References cited: : 
EP-A1- 1 760 768
EP-A1- 1 905 867
 EP-A1- 1 905 866
EP-A2- 1 557 481
   
  • LEE K B ET AL: "Preparation and ferroelectric properties of Bi-modified lead zirconate titanate thin film", JOURNAL OF MATERIALS SCIENCE, vol. 33, no. 23, 1 December 1998 (1998-12-01), pages 5707-5711, XP019209294, ISSN: 1573-4803
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).