(19)

(11)

EP 1 973 682 A2

(12)

(88) Date of publication A3: 07.08.2008 (43) Date of publication: 01.10.2008 Bulletin 2008/40 (21) Application number: 06851795.2 (22) Date of filing: 20.12.2006

(51) International Patent Classification (IPC):  B22F 1/00(2006.01) H01L 21/445(2006.01) H01B 1/02(2006.01) (86) International application number: PCT/US2006/048699 (87) International publication number: WO 2008/048316 (24.04.2008 Gazette 2008/17)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 20.12.2005 US 752143 P 20.12.2005 US 752144 P 21.12.2005 US 752628 P 19.12.2006 US 613136 (71) Applicant: Pchem Associates, Inc. Bensalem PA 19020 (US)	(72) Inventors: JABLONSKI, Gregory A. Yardley PA 19067 (US) MASTROPIETRO, Michael A. Bridgewater NJ 08807 (US) WARGO, Christopher J. Somerset NJ 08873 (US) (74) Representative: Hallybone, Huw George et al Carpmaels & Ransford 43-45 Bloomsbury Square London WC1A 2RA London WC1A 2RA (GB)