(19)

(11)

EP 1 974 243 A1

(12)

(43) Date of publication: 01.10.2008 Bulletin 2008/40 (21) Application number: 07718306.9 (22) Date of filing: 05.01.2007

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) (86) International application number: PCT/US2007/000457 (87) International publication number: WO 2007/084279 (26.07.2007 Gazette 2007/30)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 13.01.2006 US 331752 (71) Applicant: Massachusetts Institute of Technology Cambridge MA 2139 (US)	(72) Inventors: MENON, Rajesh Cambridge, MA 02138 (US) SMITH, Henry I. Sudbury, MA 01776 (US) (74) Representative: Pfenning, Meinig & Partner GbR  Patent- und Rechtsanwälte Theresienhöhe 13 80339 München 80339 München (DE)