(19)
(11) EP 1 976 336 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
13.05.2009 Bulletin 2009/20

(43) Date of publication A2:
01.10.2008 Bulletin 2008/40

(21) Application number: 08251092.6

(22) Date of filing: 27.03.2008
(51) International Patent Classification (IPC): 
H05B 3/28(2006.01)
 H01L 21/687(2006.01)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA MK RS

(30) Priority: 28.03.2007 JP 2007085609

(71) Applicant: NGK INSULATORS, LTD.
Nagoya-City, Aichi Pref. 467-8530 (JP)

(72) Inventors:
  • Goto, Yoshinobu
    Nagoya City, Aichi-ken, 467-8530 (JP)
  • Okajima, Hisakazu
    Nagoya City, Aichi-ken, 467-8530 (JP)

(74) Representative: Paget, Hugh Charles Edward et al
Mewburn Ellis LLP 33 Gutter Lane
London EC2V 8AS
London EC2V 8AS (GB)

   


(54) Heating device


(57) A heating device made of ceramics includes: a plate-like heating base having a heating surface; and a hollow cylindrical support member bonded to a back surface of the heating base. A concave surface portion that connects the back surface of the heating base and an outer surface of the support member smoothly to each other is formed in the vicinity of an outer end of a bonding interface between the heating base and the support member. On a cross section including an axis of the support member, the concave surface portion has a curved line of an arc of a ellipsoid in which a minor axis direction is parallel to an axis direction of the support member.







Search report