(19)

(11)

EP 1 976 806 A2

(12)

(88) Date of publication A3: 29.11.2007 (43) Date of publication: 08.10.2008 Bulletin 2008/41 (21) Application number: 06844980.0 (22) Date of filing: 07.12.2006

(51) International Patent Classification (IPC):  C03C 15/00(2006.01) (86) International application number: PCT/US2006/046765 (87) International publication number: WO 2007/070353 (21.06.2007 Gazette 2007/25)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 09.12.2005 US 299295 09.12.2005 US 298555 (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)

(72) Inventors: WASINGER, Erik C. Naperville, IL 60563 (US) ETTINGER, Gary C. Cupertino, CA 95014 (US) KO, Sen-Hou Sunnyvale, CA 94087 (US) HSU, Wei-Yung Santa Clara, CA 95054 (US) CHEN, Liang-Yuh Foster City, CA 94404 (US) SHIN, Ho, Seon Cupertino, CA 95014 (US) OLGADO, Donald Palo Alto, CA 94301 (US) (74) Representative: Zimmermann, Gerd Heinrich  Zimmermann & Partner Isartorplatz 1 D-80331 München D-80331 München (DE)