(19)
(11) EP 1 983 553 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
19.02.2014 Bulletin 2014/08

(45) Mention of the grant of the patent:
06.11.2013 Bulletin 2013/45

(21) Application number: 07713948.3

(22) Date of filing: 08.02.2007
(51) International Patent Classification (IPC): 
H01L 21/20(2006.01)
H01L 21/762(2006.01)
 H01L 29/786(2006.01)
H01L 27/12(2006.01)
(86) International application number:
PCT/JP2007/052232
(87) International publication number:
WO 2007/091639 (16.08.2007 Gazette 2007/33)

(54)

METHOD FOR MANUFACTURING SOI SUBSTRATE

VERFAHREN ZUR HERSTELLUNG EINES SOI-SUBSTRATS

PROCEDE DE FABRICATION D'UN SUBSTRAT SOI

(84) Designated Contracting States:
BE DE FR

(30) Priority: 09.02.2006 JP 2006031913

(43) Date of publication of application:
22.10.2008 Bulletin 2008/43

(73) Proprietor: Shin-Etsu Chemical Co., Ltd.
Tokyo 100-0004 (JP)

(72) Inventors:
  • AKIYAMA, Shoji
    Annaka-shi, Gunma 379-0195 (JP)
  • KUBOTA, Yoshihiro
    Annaka-shi, Gunma 379-0195 (JP)
  • ITO, Atsuo
    Annaka-shi, Gunma 379-0195 (JP)
  • KAWAI, Makoto
    Annaka-shi, Gunma 379-0195 (JP)
  • TOBISAKA, Yuuji
    Annaka-shi, Gunma 379-0195 (JP)
  • TANAKA, Koichi
    Annaka-shi, Gunma 379-0195 (JP)

(74) Representative: HOFFMANN EITLE 
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München
81925 München (DE)


(56) References cited: : 
WO-A2-2005/029576
JP-A- 2001 507 525
JP-A- 2005 142 524
US-A1- 2005 028 727
US-B1- 6 486 008
 JP-A- 11 067 740
JP-A- 2001 525 991
JP-A- 2005 166 911
US-A1- 2005 255 670
US-B1- 6 537 938
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).