(19)
(11) EP 1 984 787 A1

(12)

(43) Date of publication:
29.10.2008 Bulletin 2008/44

(21) Application number: 07703454.4

(22) Date of filing: 14.02.2007
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
(86) International application number:
PCT/EP2007/001267
(87) International publication number:
WO 2007/093396 (23.08.2007 Gazette 2007/34)
(84) Designated Contracting States:
DE FR NL

(30) Priority: 17.02.2006 US 774850 P

(71) Applicant: Carl Zeiss SMT AG
73447 Oberkochen (DE)

(72) Inventors:
  • WANGLER, Johannes
    89551 Königsbronn (DE)
  • SIEKMANN, Heiko
    73431 Aalen (DE)
  • WEIBLE, Kenneth
    CH-2000 Neuchâtel (CH)
  • SCHARNWEBER, Ralf
    73430 Aalen (DE)
  • MAUL, Manfred
    73434 Aalen (DE)
  • DEGUENTHER, Markus
    73432 Aalen (DE)
  • LAYH, Michael
    73430 Aalen (DE)
  • SCHOLZ, Axel
    73430 Aalen (DE)
  • SPENGLER, Uwe
    91757 Trochtelfingen (DE)
  • VÖLKEL, Reinhard
    CH-2000 Neuchâtel (CH)

(74) Representative: Schwanhäusser, Gernot et al
Ostertag & Partner Patentanwälte Epplestr. 14
70597 Stuttgart
70597 Stuttgart (DE)

   


(54) ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS