(19)
(11) EP 1 986 950 A1

(12)

(43) Date of publication:
05.11.2008 Bulletin 2008/45

(21) Application number: 07709443.1

(22) Date of filing: 31.01.2007
(51) International Patent Classification (IPC): 
B81B 1/00(2006.01)
H01L 21/98(2006.01)
B81C 3/00(2006.01)
(86) International application number:
PCT/SE2007/050050
(87) International publication number:
WO 2007/089204 (09.08.2007 Gazette 2007/32)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 31.01.2006 SE 0600210

(71) Applicants:
  • Niklaus, Frank
    112 26 Stockholm (SE)
  • Stemme, Göran
    114 21 Stockholm (SE)

(72) Inventors:
  • Niklaus, Frank
    112 26 Stockholm (SE)
  • Stemme, Göran
    114 21 Stockholm (SE)

(74) Representative: Lindgren, Anders 
BRANN AB Västgötagatan 2 P.O. Box 17192
104 62 Stockholm
104 62 Stockholm (SE)

   


(54) MEMS COMPONENTS AND METHOD FOR MANUFACTURING SAME