(19)

(11)

EP 1 991 991 A2

(12)

(88) Date of publication A3: 13.12.2007 (43) Date of publication: 19.11.2008 Bulletin 2008/47 (21) Application number: 07751343.0 (22) Date of filing: 20.02.2007

(51) International Patent Classification (IPC):  G12B 21/20(2006.01) G01N 13/10(2006.01) (86) International application number: PCT/US2007/004574 (87) International publication number: WO 2007/098237 (30.08.2007 Gazette 2007/35)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 20.02.2006 US 743321 P (71) Applicant: VEECO INSTRUMENTS INC. Plainview, NY 11803 (US)	(72) Inventors: DAHLEN, Gregory, A. Santa Barbara, CA 93101 (US) LIU, Hao-chih Goleta, CA 93117 (US) (74) Representative: Winter, Brandl, Fürniss, Hübner Röss, Kaiser, Polte Partnerschaft Patent- und Rechtsanwaltskanzlei  Bavariaring 10 80336 München 80336 München (DE)