(19)
(11) EP 1 994 446 A1

(12)

(43) Date of publication:
26.11.2008 Bulletin 2008/48

(21) Application number: 07703561.6

(22) Date of filing: 26.02.2007
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
(86) International application number:
PCT/EP2007/001638
(87) International publication number:
WO 2007/096195 (30.08.2007 Gazette 2007/35)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 24.02.2006 US 776275 P

(71) Applicant: MICRONIC LASER SYSTEMS AB
183 03 Täby (SE)

(72) Inventors:
  • SANDSTRÖM, Torbjörn
    S-435 43 Pixbo (SE)
  • SANDSTRÖM, Torbjörn
    S-435 43 Pixbo (SE)
  • IVONIN, Igor
    S-413 26 Göteborg (SE)

   


(54) SLM LITHOGRAPHY: PRINTING TO BELOW K1=.30 WITHOUT PREVIOUS OPC PROCESSING