Multipoint voltage and current probe system

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EP 1 995 759 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	27.02.2019 Bulletin 2019/09

(45)	Mention of the grant of the patent:
	12.12.2018 Bulletin 2018/50

(21)	Application number: 07253937.2

(22)	Date of filing: 04.10.2007

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International Patent Classification (IPC):

H01J 37/32^(2006.01)

(54)	Multipoint voltage and current probe system Mehrpunktspannungs- und Stromsondensystem Système de sonde multipoint de tension et de courant

(84)	Designated Contracting States:
	DE FR GB

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Priority:

14.03.2007 US 894738
14.06.2007 US 763298

(43)	Date of publication of application:
	26.11.2008 Bulletin 2008/48

(60)	Divisional application:
	18199675.2

(73)	Proprietor: MKS Instruments, Inc.
	Andover, MA 01810 (US)

(72)	Inventors:
	Choueiry, Ray Rochester, New York 14623 (US) Heckleman, Todd Spencerport, New York 14559 (US) Coumou, David J Webster, New York 14580 (US)

(74)	Representative: Cozens, Paul Dennis et al
	Mathys & Squire LLP The Shard 32 London Bridge Street London SE1 9SG The Shard 32 London Bridge Street London SE1 9SG (GB)

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References cited: :

EP-A2- 1 244 133
US-A- 5 939 886
US-A1- 2004 065 539
US-A1- 2006 239 389

WO-A2-2004/008502
US-A1- 2004 007 326
US-A1- 2006 232 471
US-A1- 2006 249 729

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).