(19)
(11) EP 1 999 443 A2

(12)

(88) Date of publication A3:
23.10.2008

(43) Date of publication:
10.12.2008 Bulletin 2008/50

(21) Application number: 07757485.3

(22) Date of filing: 26.02.2007
(51) International Patent Classification (IPC): 
G01J 1/20(2006.01)
G01B 11/02(2006.01)
G06K 9/36(2006.01)
(86) International application number:
PCT/US2007/062809
(87) International publication number:
WO 2007/106657 (20.09.2007 Gazette 2007/38)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 14.03.2006 US 782679 P

(71) Applicant: AMO Manufacturing USA, LLC
Santa Ana, CA 92705 (US)

(72) Inventors:
  • GROSS, Erik
    Palo Alto, California 94306 (US)
  • CAMPBELL, Charles
    Berkeley, California 94705 (US)

(74) Representative: Kazi, Ilya et al
Mathys & Squire LLP 120 Holborn
London EC1N 2SQ
London EC1N 2SQ (GB)

   


(54) SPATIAL FREQUENCY WAVEFRONT SENSOR SYSTEM AND METHOD