DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES - Patent 1999781

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EP 1 999 781 A2

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(88)	Date of publication A3:
	13.12.2007

(43)	Date of publication:
	10.12.2008 Bulletin 2008/50

(21)	Application number: 07753250.5

(22)	Date of filing: 16.03.2007

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International Patent Classification (IPC):

H01L 21/00^(2006.01)

(86)	International application number:
	PCT/US2007/006607

(87)	International publication number:
	WO 2007/109117 (27.09.2007 Gazette 2007/39)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

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Priority:

16.03.2006 US 783157 P
14.03.2007 US 724556

(71)	Applicant: TEGAL CORPORATION
	Petaluma, CA 94954 (US)

(72)	Inventor:
	DITIZIO, Robert Petaluma, CA 94954 (US)

(74)	Representative: Jennings, Michael John et al
	A.A. Thornton & Co. 235 High Holborn GB-London WC1V 7LE GB-London WC1V 7LE (GB)

(54)	DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES