(19)

(11)

EP 1 999 804 A2

(12)

(88) Date of publication A3: 28.02.2008 (43) Date of publication: 10.12.2008 Bulletin 2008/50 (21) Application number: 07748871.6 (22) Date of filing: 10.01.2007

(51) International Patent Classification (IPC):  H01L 51/54(2006.01) H01L 51/46(2006.01) (86) International application number: PCT/US2007/000629 (87) International publication number: WO 2007/111763 (04.10.2007 Gazette 2007/40)

(84) Designated Contracting States: DE FR GB IT NL (30) Priority: 20.03.2006 US 384769 20.03.2006 US 384770 (71) Applicant: GENERAL ELECTRIC COMPANY Schenectady, NY 12345 (US)

(72) Inventors: LIU, Jie Niskayuna, NY 12309 (US) CELLA, James, Anthony Clifton Park, NY 12065 (US) LEWIS, Larry, Neil Scotia, NY 12302 (US) DUGGAL, Anil, Raj Niskayuna, NY 12309 (US) SPIVACK, James, Lawrence Cobleskill, NY 12043 (US) YE, Qing Schenectady, NY 12309 (US) (74) Representative: Bedford, Grant Richard  GE London Patent Operation 15 John Adam Street London WC2N 6LU 15 John Adam Street London WC2N 6LU (GB)