(19)

(11)

EP 2 002 028 A2

(12)

(88) Date of publication A3: 22.11.2007 (43) Date of publication: 17.12.2008 Bulletin 2008/51 (21) Application number: 07754627.3 (22) Date of filing: 03.04.2007

(51) International Patent Classification (IPC):  C23C 14/34(2006.01) (86) International application number: PCT/US2007/008130 (87) International publication number: WO 2007/114899 (11.10.2007 Gazette 2007/41)

(84) Designated Contracting States: DE FR GB IE IT (30) Priority: 04.04.2006 US 788715 P 30.03.2007 US 731105 (71) Applicant: PRAXAIR TECHNOLOGY, INC. Danbury, CT 06810-5113 (US)	(72) Inventors: BLANCHET, Jean-Pierre F-31810 Venerque (FR) HUR, JungHoon Cheonan City 330-220 (KR) SHIH, Robert HsinChu, 30067 (TW) (74) Representative: Schwan - Schwan - Schorer  Patentanwälte European Patent Attorneys Bauerstrasse 22 80796 München 80796 München (DE)