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EP 2 002 301 A1

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(43) Date of publication: 17.12.2008 Bulletin 2008/51 (21) Application number: 07723892.1 (22) Date of filing: 02.04.2007

(51) International Patent Classification (IPC):  G02B 17/08(2006.01) G02B 7/182(2006.01) G03F 7/20(2006.01) (86) International application number: PCT/EP2007/002951 (87) International publication number: WO 2007/112997 (11.10.2007 Gazette 2007/41)

(84) Designated Contracting States: DE FR NL (30) Priority: 31.03.2006 US 395719 (71) Applicant: Carl Zeiss SMT AG 73447 Oberkochen (DE)

(72) Inventors: SCHERLE, Hans-Jürgen 73432 Aalen (DE) KWAN, Yim-Bun, Patrick 73431 Aalen (DE) XALTER, Stefan 73447 Oberkochen (DE) LIPPERT, Johannes 91592 Buch am Wald (DE) WEBER, Ulrich 89073 Ulm (DE) GEUPPERT, Bernhard 73466 Lauchheim (DE) GELLRICH, Bernhard 73434 Aalen (DE) KUGLER, Jens 73431 Aalen (DE) SORG, Franz 73431 Aalen (DE) HEINTEL, Willi 73434 Aalen (DE) KIRCHNER, Harald 81247 München (DE) KELLER, Wolfgang 89155 Erbach (DE) FROMMEYER, Andreas 73434 Aalen (DE) MORRISON, Fraser, G. Trinity Edingburgh DH5 3ET (GB) (74) Representative: Cohausz & Florack  Patent- und Rechtsanwälte Bleichstrasse 14 40211 Düsseldorf 40211 Düsseldorf (DE)