(19)
(11) EP 2 002 469 A1

(12)

(43) Date of publication:
17.12.2008 Bulletin 2008/51

(21) Application number: 07754622.4

(22) Date of filing: 03.04.2007
(51) International Patent Classification (IPC): 
H01L 21/336(2006.01)
H01L 29/786(2006.01)
H01L 21/20(2006.01)
 H01L 29/06(2006.01)
H01L 21/8242(2006.01)
(86) International application number:
PCT/US2007/008124
(87) International publication number:
WO 2007/120493 (25.10.2007 Gazette 2007/43)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

(30) Priority: 04.04.2006 US 397527
04.04.2006 US 397430
04.04.2006 US 397358
04.04.2006 US 397413
04.04.2006 US 397406

(71) Applicant: Micron Technology, Inc.
Boise, ID 83716-9632 (US)

(72) Inventor:
  • FORBES, Leonard
    Corvallis, Oregon 97330 (US)

(74) Representative: Collins, John David 
Marks & Clerk 90 Long Acre
London WC2E 9RA
London WC2E 9RA (GB)

   


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