(19)
(11) EP 2 005 253 A1

(12)

(43) Date of publication:
24.12.2008 Bulletin 2008/52

(21) Application number: 07741659.2

(22) Date of filing: 10.04.2007
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
(86) International application number:
PCT/JP2007/058223
(87) International publication number:
WO 2007/119839 (25.10.2007 Gazette 2007/43)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

(30) Priority: 12.04.2006 JP 2006110342

(71) Applicant: Nikon Corporation
Tokyo 100-8331 (JP)

(72) Inventors:
  • NOBORU, Michio
    Chiyoda-ku, Tokyo 100-8331 (JP)
  • SHIRAISHI, Naomasa
    Chiyoda-ku, Tokyo 100-8331 (JP)

(74) Representative: Hooiveld, Arjen Jan Winfried et al
Arnold & Siedsma Sweelinckplein 1
2517 GK Den Haag
2517 GK Den Haag (NL)

   


(54) ILLUMINATION OPTICAL APPARATUS, PROJECTION EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD