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(11)

EP 2 005 460 A1

(12)

(43) Date of publication: 24.12.2008 Bulletin 2008/52 (21) Application number: 06758214.8 (22) Date of filing: 27.03.2006

(51) International Patent Classification (IPC):  H01J 37/302(2006.01) (86) International application number: PCT/US2006/011303 (87) International publication number: WO 2007/111603 (04.10.2007 Gazette 2007/40)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (71) Applicants: Multibeam Systems, Inc. Santa Clara, CA 95054-3306 (US) Tokyo Electron Limited Tokyo 107-6325 (JP)	(72) Inventor: PARKER, William, N. Pleasanton, California 94566 (US) (74) Representative: Freeman, Avi  Beck Greener Fulwood House, 12 Fulwood Place, London WC1V 6HR London WC1V 6HR (GB)