(19)
(11) EP 2 009 287 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
20.07.2016 Bulletin 2016/29

(43) Date of publication A2:
31.12.2008 Bulletin 2009/01

(21) Application number: 08011531.4

(22) Date of filing: 25.06.2008
(51) International Patent Classification (IPC): 
F04D 19/04(2006.01)
F04B 49/06(2006.01)
 F04B 37/16(2006.01)
F04C 25/02(2006.01)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated Extension States:
AL BA MK RS

(30) Priority: 26.06.2007 JP 2007167639
20.06.2008 JP 2008162248

(71) Applicant: Mitutoyo Corporation
Kawasaki-shi, Kanagawa 213-8533 (JP)

(72) Inventor:
  • Saruki, Yoshio
    Takatsu-ku Kawasaki-shi Kanagawa 213-8533 (JP)

(74) Representative: Grünecker Patent- und Rechtsanwälte PartG mbB 
Leopoldstraße 4
80802 München
80802 München (DE)

   


(54) Vacuum-exhaust device and vacuum-exhaust method


(57) In a vacuum-exhaust device, a pair of first and second on-off valves (121, 122) are provided in series between a vacuum chamber (101) and an oil-rotary vacuum pump (110). A vacuometer (140) for measuring a vacuum degree is provided between the pair of first and second on-off valves (121, 122). After storing a vacuum degree of the vacuum chamber (101) measured with the first on-off valve (121) being open, the controller closes the first on-off valve (121) and opens the second on-off valve (122) to obtain a vacuum degree in the vicinity of the oil-rotary vacuum pump (110). Then, the controller opens the first on-off valve (121) and the second on-off valve (122), so that the vacuum chamber (101) is evacuated by the driving of the oil-rotary vacuum pump (110). With this arrangement, while oil, oil vapor and the like from the oil-rotary vacuum pump (110) can be prevented from flowing into the vacuum chamber (101), the vacuum degree can be measured with the single vacuometer (140).







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Search report