(19)
(11) EP 2 010 355 A1

(12)

(43) Date of publication:
07.01.2009 Bulletin 2009/02

(21) Application number: 07727502.2

(22) Date of filing: 29.03.2007
(51) International Patent Classification (IPC): 
B23K 26/06(2006.01)
G02B 27/09(2006.01)
H01L 21/20(2006.01)
 B23K 26/08(2006.01)
B23K 26/073(2006.01)
(86) International application number:
PCT/EP2007/053030
(87) International publication number:
WO 2007/122061 (01.11.2007 Gazette 2007/44)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 21.04.2006 US 745333 P

(71) Applicant: Carl Zeiss Laser Optics GmbH
73447 Oberkochen (DE)

(72) Inventors:
  • EGGER, Rafael
    81927 München (DE)
  • MARCZUK, Piotr
    AALEN 73434 (DE)
  • SEIFERT, Wolfgang
    AALEN 73431 (DE)
  • TRITSCHLER, Thorsten
    73430 Aalen (DE)
  • ZENZINGER, Markus
    89073 Ulm (DE)
  • ANDERL, Willi
    HÜTTLINGEN 73460 (DE)
  • WALTHER, Jörg
    89547 Gerstetten (DE)

(74) Representative: Carl Zeiss AG - Patentabteilung 
Carl Zeiss AG c/o Patentabteilung Carl-Zeiss-Straße 22
D-73447 Oberkochen
D-73447 Oberkochen (DE)

   


(54) APPARATUS FOR LASER ANNEALING OF LARGE SUBSTRATES AND METHOD FOR LASER ANNEALING OF LARGE SUBSTRATES