LASER PROCESSING METHOD AND LASER PROCESSING APPARATUS

Abstract

 [PROBLEMS] The present invention provides a method and an apparatus for efficiently processing in patterning of an electronic circuit board even when laser beams of differing intensities and wavelengths are irradiated in multiple stages.
[MEANS FOR SOLVING PROBLEMS] A laser processing apparatus is provided with first and second laser oscillators (2a, 2b) for emitting laser beams (3a, 3b) of which at least the wavelength or the intensities are different from each other; a stage apparatus (5) for moving a workpiece (1) to be processed; and optical systems (4a, 4b) for guiding the laser beams (3a, 3b) to prescribed positions of the workpiece (1). The optical systems (4a, 4b) can be moved by means of an adjusting device (6) according to the relative moving direction of the laser beams (3a, 3b) and the workpiece (1) to permit the prescribed position of the workpiece (1) to be irradiated with laser beams (3a, 3b) in that order so that the workpiece (1) can be processed by the laser beams (3a, 3b). Thus, efficient laser processing can be performed without limiting the relative moving direction of the laser beams and the workpiece and without unnecessary movement.

Description

TECHNICAL FIELD

[0001] The present invention relates to a method for performing processing of a workpiece using laser beams, and an apparatus which implements this method.

BACKGROUND ART

[0002] Heretofore, when using laser beam irradiation to cut or weld a workpiece, or to remove only a specified layer from the surface of a workpiece, for example, there have been cases in which laser beams of differing intensities and wavelengths are irradiated in multiple stages, such as preliminary heat treatment and main processing, or removal of a first layer and removal of a second layer.

[0003] Patent Reference 1 discloses a technology for raising the processing efficiency in such cases, which uses an array of as many laser oscillators as the number of layers to be processed, each emitting a laser beam effective to a specific layer, for example.

Patent Reference 1: Japanese Patent Application Kokai Publication No. H08-10970

[0004] Moreover, Patent Reference 2 discloses a technology in which a plurality of laser oscillators for emitting laser beams of differing wavelengths are disposed so that the laser beams are emitted along the same axis, and ON/OFF control of the various laser beams is used to irradiate laser beams of differing wavelengths onto a workpiece.

Patent Reference 2: Japanese Patent Application Kokai Publication No. 2002-270994.

DISCLOSURE OF THE INVENTION

PROBLEMS TO BE SOLVED BY THE INVENTION

[0005] In patterning of an electronic circuit board, laser processing is carried out by moving either a board or a laser beam irradiation in an X-Y direction, for example.

[0006] In the case of such patterning of an electronic circuit board, the following problems arise in the technologies of Patent Reference 1 and Patent Reference 2, when laser beams of differing intensities and wavelengths are irradiated in multiple stages.

[0007] First, in the case of the technology of Patent Reference 1, laser oscillators are arrayed as many as the number of layers to be processed, and thus the board or the laser beam irradiation must be moved over an extra distance in the X-direction and in the Y-direction, resulting in the problems of reduced processing efficiency and reduced productivity.

[0008] Furthermore, in the case of the technology of Patent Reference 1, since there is a previously determined relative irradiation position of the laser beams emitted from the laser oscillators which are arrayed as many as the number of the layers to be processed, there is the problem that processing is impossible in cases where the board or the laser beam irradiation moves in the reverse direction.

[0009] In the case of the technology of Patent Reference 2, since laser beams of differing wavelengths are irradiated along the same axis, it is impossible to continuously process a plurality of layers. Consequently, this leads to the problems of reduced processing efficiency and reduced productivity, as when the technology of Patent Reference 1 is employed.

[0010] The problems to be solved by the present invention are the reduced processing efficiency and the reduced productivity that result when the prior art is employed in patterning of an electronic circuit board, using laser beams of differing intensities and wavelengths irradiated in multiple stages.

MEANS FOR SOLVING THESE PROBLEMS

[0011] The laser processing method of the present invention relates to a method for efficiently processing in patterning of an electronic circuit board even when laser beams of differing intensities and wavelengths are irradiated in multiple stages. The method is characterized in that a plurality of laser beams, of which at least the wavelength or the intensity is different from each other, are irradiated onto a workpiece in the sequential order of the differing intensity and wavelength. According to the method, when irradiating a workpiece with laser beams, as the laser beams and the workpiece move relative to each other, the laser beam irradiation position is changed according to the direction of their relative motion, so that the plurality of laser beams irradiate the workpiece in the abode-mentioned sequential order.

[0012] Furthermore, the laser processing apparatus of the present invention is an apparatus for implementing the laser processing method of the present invention. The apparatus comprises:

a plurality of laser oscillators which emit laser beams of which at least the wavelength or the intensity differ from each other, and

a stage device which moves either the laser beams or the workpiece relative to each other, and

optical systems which guide the laser beams emitted from the plurality of laser oscillators to a predetermined position on the workpiece.

The optical systems are formed so as to be adjusted by means of an adjusting device to irradiate the laser beams at a predetermined position onto the workpiece in the sequential order of the differing wavelength and intensity, thereby making it possible for the processing of the workpiece to be performed by the laser beams irrespective of the direction of relative motion of the laser beams and the workpiece.

[0013] In the present invention, when the laser beams and the workpiece are caused to move relative to each other, in particular, when the laser beams are caused to move, this can be achieved by either adjusting the laser oscillators which emit the laser beams and the optical devices or adjusting the optical device while the lasers are made stationary.

ADVANTAGEOUS EFFECTS OF THE INVENTION

[0014] In the present invention, laser processing can be accomplished efficiently, without limiting the direction of their relative motion between the laser beams and the workpiece, and without excessive movement, even in cases where laser beams with differing intensities and wavelengths are irradiated in multiple stages in patterning of an electronic circuit board.

BRIEF DESCRIPTION OF THE ATTACHED DRAWINGS

[0015] 

FIG. 1 is a diagram illustrating an example of the basic structure of a laser processing apparatus of the present invention.

FIG. 2 is a diagram of the present invention laser processing apparatus of FIG. 1, illustrating the case where motion is in the direction opposite to that in FIG. 1.

FIG. 3 is a schematic diagram illustrating the basic structure of an alternative example of a laser processing apparatus of the present invention.

DESCRIPTION OF THE REFERENCE SYMBOLS

[0016] 

1

Workpiece

1a

First metal layer

1b

Second metal layer

2a

First laser oscillator

2b

Second laser oscillator

3a

First laser beam

3b

Second laser beam

4a

First optical system

4ab

First reflecting mirror

4b

Second optical system

4bb

Second reflecting mirror

5

Stage device

6

Adjusting mechanism

7

Detector

8

Control device

PREFERRED EMBODIMENT

[0017] The present invention utilizes the following constitution to achieve the objective of efficient processing in patterning of an electronic circuit board when laser beams of differing intensities and wavelengths are irradiated in multiple stages.

[0018] In the present invention, as a plurality of laser beams and the workpiece move relative to each other, the laser beam irradiation position is changed according to the direction of their relative motion, so that the laser beams irradiate the workpiece in the sequential order of the above-mentioned differing wavelengths and intensities.

EXAMPLES

[0019] Preferred embodiments are described in detail using FIG. 1 to FIG. 3.
FIG. 1 is a diagram illustrating an example of the basic structure of a laser processing apparatus of the present invention. FIG. 2 is a diagram of the present invention laser processing apparatus of FIG. 1, illustrating the case where motion is in the direction opposite to that in FIG. 1. FIG. 3 is a schematic diagram illustrating the basic structure of an alternative example of a laser processing apparatus of the present invention.

[0020] FIG. 1 shows an example of a laser processing apparatus of the present invention, for removing first and second metal layers 1a and 1b formed on a surface of a workpiece 1, such as a circuit board.

[0021] In FIG. 1, 2a and 2b are examples of a first and a second YAG laser oscillator (referred to below simply as laser oscillators). The first laser oscillator 2a emits a laser beam 3a which has a wavelength and intensity suitable for removing the first metal layer 1a. The second laser oscillator 2b emits a laser beam 3b which has a wavelength or intensity suitable for removing the second metal layer 1b.

[0022] The first and second laser beams 3a and 3b emitted from the first and second laser oscillators 2a and 2b are mediated by first and second optical systems 4a and 4b, respectively, and are irradiated onto a surface of the workpiece 1 which is moved to the left, for example, in the drawing, being mounted on a stage device 5, so as to remove the first and second metal layers 1a and 1b.

[0023] FIG. 1 shows the first optical system 4a is formed from a first beam-forming optical system 4aa, a first reflecting mirror 4ab, and a condenser lens 4c, and the second optical system 4b is formed from a second beam-forming optical system 4ba, a second reflecting mirror 4bb, and a condenser lens 4c. However, it is not necessarily the case that this system is limited to using the same condenser lens 4c, as in FIG. 1.

[0024] In the present invention, the workpiece 1 is moved by the stage device 5 additionally to the right in the drawing, but when so moved, if the first and second optical systems 4a and 4b remain disposed as shown in FIG. 1, removal of the first and second metal layers 1a and 1b of the workpiece 1 cannot be performed properly, as is also the case in Patent Reference 1.

[0025] Accordingly, the constitution of the present invention makes it possible to irradiate the first laser beam 3a on the right side as well as on the left side of the second laser beam 3b in FIG. 1, by using an adjusting mechanism 6 to change the angular position of the first reflecting mirror 4ab of the first optical system 4a, for example.

[0026] In accordance with such a constitution, even if the workpiece 1 moves to the right, to the side opposite to that in FIG. 1, it is possible to irradiate the second metal layer 1b with the second laser beam 3b, as shown in FIG. 2, after removing the first metal layer 1a by irradiating the first laser beam 3a onto the first metal layer 1a.

[0027] Using the laser processing apparatus of the present invention with the above-described constitution, the first and second metal layers 1a and 1b formed on the surface of the workpiece 1 are removed as described below.
First, as shown in FIG. 1, when the workpiece 1 moves to the left in the drawing, the position of the first reflecting mirror 4ab is set so that the first laser beam 3a irradiates the left side in the drawing, and the second laser beam 3b irradiates on the right side of the first laser beam 3a in the drawing.

[0028] In this state, a control device 8 drives the stage device 5, moving the workpiece 1 to the right side in the drawing, emits the first and second laser beams 3a and 3b from the first laser oscillator 2a and the second laser oscillator 2b to remove the first and second metal layers 1a and 1b.

[0029] When a detector 7 detects the arrival of the workpiece 1 at a return point, the control device 8 generates a command to the first and second laser oscillators 2a and 2b to suspend emission of the first and second laser beams 3a and 3b, on the basis of a signal from the detector 7.

[0030] Next, the control device 8 generates a command to the adjusting mechanism 6 to adjust the first reflecting mirror 4ab, so that the irradiation positions of the first and second laser beams 3a and 3b are the inverse of those of FIG. 1. After inversion, the control device 8 generates a command to the first and second laser oscillators 2a and 2b to re-start emission of the first and second laser beams 3a and 3b, and the control device 8 also generates a command to the stage device 5 to move the workpiece 1 to the right in FIG. 2.

[0031] The present invention is not limited to the above example, and may be suitably modified, as long as it is within the scope of the technical concepts recited in the claims.

[0032] For example, in the examples shown in FIG. 1 and FIG. 2, the first reflecting mirror 4ab is adjusted, but instead the second reflecting mirror 4bb may be adjusted.

[0033] As shown in FIG. 3, the processing area can be enlarged by adding an optical element 4d to the first and second optical systems 4a and 4b of the present invention laser processing apparatus shown in FIG. 1 and FIG. 2 in order to split laser beams 3a and 3b.

[0034] Moreover, in the examples shown in FIG. 1 and FIG. 2, when removing thin-films from the workpiece 1, the first metal layer 1a is removed, followed by the second metal layer 1b, but the first metal layer 1a may be removed after removing the second metal layer 1b.

[0035] The above examples describe cases in which thin-films are removed by irradiating laser beams on the upper surface side of the workpiece 1, but the present invention can of course also be applied in cases where a thin-film is removed from the bottom surface side by irradiating laser beams.

INDUSTRIAL APPLICABILITY

[0036] The present invention can be used not only for the removal of thin-films, but also for any type of laser processing such as micromachining, as long as the processing requires the irradiation of laser beams onto a workpiece.

Claims

1. A laser processing method in which a plurality of laser beams, of which at least the wavelength or the intensity is different from each other, are irradiated onto a workpiece in the sequential order of the differing wavelength and intensity to process the workpiece, the method being characterized in :

moving the laser beams and the workpiece relative to each other; and

when irradiating the workpiece with the laser beams, changing laser beam irradiation positions according to a direction of their relative motion, so that the plurality of laser beams irradiate the workpiece in the sequential order.

2. Apparatus for implementing the laser processing method of claim 1, comprising:

a plurality of laser oscillators which emit laser beams of which at least the wavelength or the intensity differ from each other;

a stage device which moves either the laser beams or the workpiece relative to each other; and

an optical system which guides the laser beams emitted from the plurality of laser oscillators to a predetermined position on the workpiece,

wherein the optical system is formed so as to be adjusted by means of an adjusting device to irradiate the laser beams at a predetermined position onto the workpiece in the sequential order of the differing wavelength and intensity, thereby making it possible for the processing of the workpiece to be performed by the laser beams irrespective of the direction of relative motion of the laser beams and the workpiece.

Amended claims

Amended claims under Art. 19.1 PCT

1. A laser processing method in which a plurality of laser beams, of which at least a wavelength or a intensity is different from each other, are irradiated onto a workpiece in the sequential order of the differing wavelength and intensity to process the workpiece, the method being characterized in :

moving the laser beams and the workpiece relative to each other;

via optical systems of the same configuration having a condenser lens in common, irradiating the laser beams onto the workpiece such that at least one of the laser beams passes through the center of the condenser lens; and

changing laser beam irradiation positions according to a direction of their relative motion, so that the plurality of laser beams irradiate the workpiece in the sequential order.

2. Apparatus for implementing the laser processing method of claim 1, comprising:

a plurality of laser oscillators which emit laser beams of which at least a wavelength or a intensity differ from each other;

a stage device which moves either the laser beams or the workpiece relative to each other;

optical systems which guide the laser beams emitted from the plurality of laser oscillators to a predetermined position on the workpiece, the optical systems being of the same configuration having a condenser lens in common, wherein at least one of the laser beams passes through the center of the condenser lens, and

wherein the optical systems are formed so as to be adjusted by means of an adjusting device to irradiate the laser beams at a predetermined position onto the workpiece in the sequential order of the differing wavelength and intensity, thereby making it possible for the processing of the workpiece to be performed by the laser beams irrespective of the direction of relative motion of the laser beams and the workpiece.

Drawing