(19)
(11) EP 2 011 897 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
28.09.2011 Bulletin 2011/39

(45) Mention of the grant of the patent:
27.07.2011 Bulletin 2011/30

(21) Application number: 08159251.1

(22) Date of filing: 27.06.2008
(51) International Patent Classification (IPC): 
C23C 14/56(2006.01)
C23G 3/00(2006.01)
C23F 1/44(2006.01)
C23F 1/00(2006.01)
B08B 3/08(2006.01)
B05B 12/10(2006.01)
 C23C 16/44(2006.01)
C23G 1/00(2006.01)
C23F 1/26(2006.01)
C23F 1/08(2006.01)
C23G 1/12(2006.01)

(54)

Method for cleaning deposition chamber parts using selective spray etch

Verfahren zur Reinigung von Ablagerungskammerteilen mithilfe der selektiven Spritzätzung

Procédél de nettoyage des pièces d'une chambre de dépôt par gravure par pulvérisation sélective

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

(30) Priority: 28.06.2007 US 946983 P

(43) Date of publication of application:
07.01.2009 Bulletin 2009/02

(60) Divisional application:
11175407.3

(73) Proprietor: Quantam Global Technologies, LLC
Quakertown, PA 18951 (US)

(72) Inventors:
  • Bao, Liyuan
    Fremont, CA 94539 (US)
  • Jiang, Anbei
    San Jose, CA 95112 (US)
  • Tan, Samantha S. H.
    Union City, CA 94587 (US)

(74) Representative: Zimmermann & Partner 
Postfach 330 920
80069 München
80069 München (DE)


(56) References cited: : 
US-A1- 2004 099 285
US-A1- 2005 172 984
 US-A1- 2005 048 876
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).