FIELD OF THE INVENTION
[0001] The present invention relates to a coating device and method, and in particular to
a micro patch coating device which can be applied in the fabrication of color filters
of flat panel liquid crystal displays (LCD) and coloring unit of the fluorescent film
in plasma display modules, or in the manufacturing of biomedical products and flexible
electronics and cells.
BACKGROUND OF THE INVENTION
[0002] With the development of information technology, flat panel display has gradually
replaced the conventional cathode ray tubes (CRT) display. Flat panel LCD, for instance,
which takes up the largest market share among all flat panel displays, is composed
of backlight source, light polarizer, glass substrate, liquid crystal, thin film transistor
(TFT), color filter (CF), etc., while the color filter is the key component determining
the color characteristics and contrast of a LCD.
[0003] Color filters in LCD and coloring unit for the fluorescent film in plasma display
panel modules are the key components of the structures that convert black and white
flat panel display into colorful ones. The coating structures of color filter for
flat panel LCD, for instance, comprises a plurality of pixels of red (R), green (G)
and blue (B) colors which are arranged in arrays on glass substrate, while a couple
of pixels (normally three) correspond to one color dot on the display. When white
light passes through the trichromatic pixels, it generates three primary colors of
light, namely the red, green and blue light, which, by means of gray scale effect
generated by the liquid crystal molecules, are further blended and form various colors.
[0004] The technologies for the fabrication of color filters can be classified into three
types. The first coating type is photolithography method, which is the most frequently
used technology currently. In the technology, uniform liquid films are coated to the
substrate and defined patterns by photolithography method sequentially. This technology
is applied to many methods including dyeing method, pigment dispersing method, electro-deposition,
etc. Another type of technology is stamping, in which the patterns are respectively
decided by stamps and impressed onto the substrate. The third type of technology is
ink injection, in which miniscule droplets of ink are injected onto a substrate by
ink injecting heads, allowing direct formation of micro patch patterns.
[0005] Referring to photolithography technology mentioned above, the prerequisite is to
coat a liquid film uniformly. Currently, the most frequently used coating method is
spin coating (as disclosed in
US Patent 4,451,507). However, due to low material utility rate, the method has recently been phased
out by other developments, such as extrusion spin coating (as disclosed in
US Patent 6,191,053) and slot patch coating (as disclosed in
US Patent 4,938,994). Both inventions aim to improve the material utility rate to allow the formation
of uniform liquid film. The difference among the various methods, the dyeing method,
pigment dispersing method and electro-deposition, lies in that the coating liquid
film materials have different characteristics and accordingly specific operation procedures
are applied.
[0006] The conventional dyeing method (as disclosed in
US Patent 4,744,635) processes a dye absorbing layer made from transparent organic photosensitive material
by photolithography and etching to form a pattern. The dye absorbing layer is immersed
in a dyeing solution. Then, the display is exposed, dyed, baked and resist dyed to
finish. The operation procedures are repeated for three cycles to obtain of three
layers of color pattern, the red, green and blue colors. The method is not only too
complicated, but also demands the installation of expensive equipment. Besides, because
of the poor resistance of dyes against heat and light, the dyeing method is limited
to apply for fabrication of small sized colorful LCD and conventional CRT.
[0007] Conventional pigment dispersing method (as disclosed in
US Patents 5,085,973 and
4,786,148) is the most popular method used in manufacturing color filters currently. Photosensitive
and thermosetting pigments are used. The procedures comprise coating coloring material
to the mask on the glass substrate, and exposure imaging, baking, etc. to produce
monochromatic micro-imaged color patch. Three cycles of operation procedures are required
to produce trichromatic RGB pixels. The pigment dispersing method is complicated and
requires expensive equipment and the operation is time-consuming, and it has low utility
rate of coloring material and limited variation in pixel pattern, and therefore this
method is not potential to meet the future demands for larger size and lower price
display panel.
[0008] Known electro-deposition (as disclosed in
US Patent 4,522,691) includes generating a patterned and transparent conductive film on a glass substrate
and coating the coloring materials thereon by electrophoresis. Similarly, three cycles
of the operation procedures are required to produce the patterns in RGB colors. The
method also includes photolithography process. Hence, a number of operation parameters
are involved, making it difficult to control the yield rate accurately. The inclusion
of an additional transparent conductive film set forth by this method is the most
significant drawback, as it lowers the light permeability and resolution, and hence
it limits the layout of the patterns which cannot be too elaborate.
[0009] To conclude, the conventional coating technology fails to define patterns directly
at coating, and it relies, instead, on exposure to remove excessive materials. Thus,
it results in low material utility rate throughout the whole process, e.g. less than
one third of the material, failing to satisfy the needs for mass production and at
low costs.
[0010] A manufacturing method using stamping is disclosed in Taiwan Patent No.
00535010. A stamp with protruded blocks is stained with dyeing materials and the stamp is
pressed to define a micro-structure pattern on a transparent insulating substrate
which is then baked. The procedures are repeated three times to produce patterns with
RGB color blocks. Despite of the advantages of high material utility rate and low
manufacturing cost, this method provides limited variation of patterns, making it
difficult to change the arrangement of the arrays of pixels at liberty.
[0011] An ink injection method is taught in Taiwan Patent No.
00512242. The ink injection method allows direct control on the positioning of ink injecting
head module for defining patterns. The procedures of the method are as follows: coating
a layer of absorbing film on a glass substrate to secure the absorption of the ink
droplets to the glass substrate; next, allowing the ink injecting head module to directly
spray the RGB color ink droplets onto the glass substrate to define the patterns required.
This ink injection method has solved the problem of low material utility rate encountered
in the conventional spin coating and photolithography, allowing higher extent of pattern
variation than the stamping method.
[0012] However, since the ink injection method basically forms a line or surface pattern
by a numerous dots, each droplet must be injected with extremely high accuracy into
a block of a few microns or even smaller dimension. Besides, the traveling paths of
droplets are susceptible to air flow disturbance, and it is likely that the ink droplets
are injected accidentally to adjacent blocks and results in contamination. Therefore,
a high precision machine is required. Also, the moving rate of the ink injecting head
module is limited to secure precise injection. This can be what holds up the application
of the method in industry. Because each of ink injecting heads is allowed to jet only
one droplet at one time, the production efficiency is very low. In order to solve
this problem, the numbers of the ink injecting heads have to be increased (which inevitably
increase the cost). Besides, when ink injections are taking place in parallel movements,
all ink injecting heads have to be in good condition without any clogging or abnormal
situation. When the ink injection method is applied in large sized display panels,
an enlarged dimension of machine is used. It should be careful to maintain good machine
mobility and coating uniformity. These problems are yet to be solved in the future
when large dimension TV displays will become the major products.
[0013] Thus, it is desired to develop a coating method that is simple in operation, has
good yield rate and is economical for application.
SUMMARY OF THE INVENTION
[0015] A primary object of the present invention is to provide a micro patch coating device
to overcome the drawbacks of above-mentioned conventional methods. In the present
invention, at least one coating fluid and at least one auxiliary fluid are conveyed
into a coating die comprising a micro channel structure, generating a two-phase fluid
having alternate arrangement of the coating fluid and the auxiliary fluid. The coating
die is driven to move along a direction in parallel to a substrate and injects the
two-phase fluid directly on the substrate at predetermined locations and forms micro
patches.
[0016] Another object of the present invention is to provide a slit coating method for generating
discontinuous pattern. The coating method comprises a fluid generator which alternatively
intercepts the supply of a coating fluid and that of an auxiliary fluid. By moving
the coating die or the substrate and coating the two-phase fluid on the substrate,
micro patches are formed on the substrate.
[0017] To fulfill the above objects, the present invention provides a device according to
claims 9 to 17 and a method for micro patch coating according to claims 1 to 8. The
micro patch coating device comprises a coating die with a micro channel structure.
A coating fluid is supplied through a coating fluid inlet and an auxiliary fluid is
supplied through an auxiliary fluid inlet. After a segment of a predetermined length
of the coating fluid is formed at a two-phase fluid output section, the coating fluid
flow is intercepted. In turn, a segment of predetermined length of the auxiliary fluid
is formed at the two-phase fluid output section, and then the auxiliary fluid flow
is intercepted. A two-phase fluid is formed and flows out of the coating die to the
substrate to form micro patches thereon.
[0018] The coating method in the present invention overcomes the low material utility rate
problem happened in spin coating and photolithography, and is applicable in coating
larger dimension display panels. The present invention also solves the problems of
low yield rate and low production efficiency in ink injection method, and it allows
high degree of variation of the pattern which cannot be achieved by stamping. The
method of the present invention lowers the manufacturing costs, improves the production
efficiency, and is capable to be used for producing larger dimension display panels
and sophisticated micro patch patterns for matching the future development.
[0019] Furthermore, the present invention provides higher material utility rate than that
of photolithography that requires repeated exposure procedures. The present invention
saves the processing time. In the coating method of the present invention, coating
patterns are formed by varying the output ratio of the coating and auxiliary fluid
and the relative movements between the coating die and the substrate. Besides, by
directly coating the two-phase fluid to the substrate, the pattern is easily changed
than that produced by stamping. Meanwhile, the method does not require of high precision
injection as that as required in conventional ink injecting and enables higher yield
rate in production.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The present invention will be apparent to those skilled in the art by reading the
following description of embodiment thereof, with reference to the attached drawings,
in which:
Figure 1 is a perspective view of a micro patch coating device constructed in accordance
with a first embodiment of the present invention;
Figure 2 is a schematic view showing the coating of a two-phase fluid onto a substrate;
Figure 3 is a schematic view showing the formation of a micro patch on the substrate;
Figure 4 is a schematic view showing the supply of a coating fluid from a coating
fluid supply tank to a micro channel of the micro patch coating device of Figure 1;
Figure 5 is a cross-sectional view showing the micro channel is driven to connect
a coating fluid supply tank and a coating fluid segment is drawn into the micro channel;
Figure 6 is a cross-sectional view showing an auxiliary fluid segment is drawn into
the micro channel;
Figure 7 is a cross-sectional view showing that the coating fluid is alternatively
intercepted by a plurality of auxiliary fluid sections;
Figure 8 is a cross-sectional view showing that a two-phase fluid is generated in
the micro channel;
Figure 9 is a perspective view of a micro patch coating device constructed in accordance
with a second embodiment of the present invention;
Figure 10 is a perspective view of a micro patch coating device constructed in accordance
with a third embodiment of the present invention;
Figure 11 is a schematic view showing a micro channel structure of a coating die of
the micro patch coating device of Figure 10;
Figure 12 is a cross-sectional view taken along line 12-12 of Figure 11;
Figure 13 is a schematic view showing the generation of a two-phase fluid by a flow
generator of the micro patch coating device of Figure 10;
Figure 14 is a schematic view showing a movement of the coating die driven by a driving
mechanism of the micro patch coating device of Figure 10;
Figure 15 is a schematic view showing a movement of the substrate driven by a panel
driving mechanism of the micro patch coating device of Figure 10;
Figure 16 is a schematic view showing a coating pattern formed on the substrate by
the micro patch coating device of Figure 10;
Figure 17 is a schematic view showing another coating pattern formed on the substrate
by the micro patch coating device of Figure 10;
Figure 18 is a flow chart for performing a micro patch coating method in accordance
with the present invention;
Figure 19 is a schematic view showing a micro channel structure of a coating die of
a fourth embodiment of a micro patch coating device constructed in accordance with
the present invention; and
Figure 20 is a cross-sectional view taken along line 20-20 of Figure 19.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0021] With reference to the drawings and in particular to Figure 1, it shows a schematic
view of a micro patch coating device 100 constructed in accordance with a first embodiment
of the present invention. The micro patch coating device 100 comprises a micro channel
12, a driving mechanism 13, a supporting member 14, a connector 15, and a fluid driving
mechanism 16.
[0022] The micro channel 12 is supported by the supporting member 14 coupled to the driving
mechanism 13. The supporting member 14 is driven to displace along a horizontal direction
I back and forth by the driving mechanism 13. In this embodiment, the micro channel
12 may be a capillary tube.
[0023] The micro channel 12 has an inlet 121 and an outlet 122. The outlet 122 of the micro
channel 12 is kept at a predetermined distance from the top surface of a substrate
6. The inlet 121 of the micro channel 12 is connected to the fluid driving mechanism
16 composed of a syringe 161, a plunger 162, and a pump 163. The connector 15 is connected
between the inlet 121 of the micro channel 12 and the syringe 161.
[0024] The syringe 161 comprises a plunger 162 which is connected to the pump 163. The pump
163 is controlled by a control device (not shown) to push the plunger 162 forward
or pull the plunger 162 backward along a direction II parallel to the lengthwise direction
of the syringe 161. When the pump 163 pushes the plunger 162 forward, the two-phase
fluid 11 contained in the micro channel 12 is driven to flow out to the outlet 122
of the micro channel 12.
[0025] Meanwhile, the driving mechanism 13 drives the micro channel 12 via the supporting
member 14 to displace along the horizontal direction I in parallel to the surface
of the substrate 6.
[0026] Please refer to Figures 2 and 3, which show the coating of the two-phase fluid onto
the substrate 6 to form a predetermined micro-patch pattern thereon. The two-phase
fluid 11 contained in the micro channel 12 is composed of a coating fluid flow alternatively
intercepted by a plurality of auxiliary fluid flow sections. That is, the two-phase
fluid 11 is composed of a number of coating fluids 2a and a number of auxiliary fluids
3. Each of the coating fluids 2a contains a specific pigment, e.g. blue, green or
red color pigment, while each of the auxiliary fluids 3 comprises a liquid or a gas
immiscible with the coating fluid 2a. As shown in Figure 3, the two-phase fluid 11
is formed of alternating segments including a number of segment 2a' of a predetermined
length of the coating fluid 2a and a number of segment 3' of a predetermined length
of the auxiliary fluid 3.
[0027] As it can be seen from the drawings, when the driving mechanism 13 moves the micro
channel 12 to displace horizontally and the fluid driving mechanism 16 pushes the
two-phase fluid 11 in the micro channel 12, the two-phase fluid 11 flows out from
the outlet 122 of the micro channel 12, thereby forming a fluid film 7' on the substrate
6.
[0028] After flowing out of the outlet 122, the two-phase fluid 11 is coated at predetermined
locations of the substrate 6 and thereby a micro-patch pattern comprising a number
of micro patches 7a is formed on the substrate 6.
[0029] In the case a gas is used as the auxiliary fluid 3, micro patches 7a are directly
formed on the substrate 6. In the case a liquid that is immiscible with the coating
fluid 2a is used as the auxiliary fluid 3, the substrate 6 could be heated to vaporize
the auxiliary fluid 3 by baking, leaving the coating fluid 2a to form the micro patches
7a. The flowing velocity of the two-phase fluid 11 is determined by the pumping rate
of the pump 163 which is controlled through the control device.
[0030] Figure 4 is a schematic view showing a preferred embodiment of two-phase fluid generating
device of the present invention. A coating fluid supply tank 18 contains the coating
fluid 2a therein and supplies the coating fluid 2a to the micro patch coating device
100. At a side of the coating fluid supply tank 18, a through hole 181 is formed at
a predetermined position that is below the free surface of the coating fluid 2a in
the coating fluid supply tank 18.
[0031] The coating fluid 2a has a surface tension at the through hole 181 that prevents
the leakage of the coating fluid 2a from the coating fluid supply tank 18, even though
no stopper or sealing is provided at the through hole 181.
[0032] For obtaining the two-phase fluid 11, the driving mechanism 13 drives the micro channel
12 to displace along the horizontal direction I, and the micro channel 12 penetrates
through the through hole 181 to the coating fluid supply tank 18, as shown in Figure
5. Then the pump 163 works to pull the plunger 162 to displace backward, and a suction
force is generated that causes the coating fluid 2a in the coating fluid supply tank
18 to be drawn into the micro channel 12, forming a segment 2a' of a predetermined
length of the coating fluid 2a in the micro channel 12.
[0033] Please refer to Figure 6. The driving mechanism 13 moves horizontally to withdraw
the micro channel 12 out of the coating fluid supply tank 18, while the pump 163 keeps
working and accordingly, air is drawn into the micro channel 12, forming a segment
3' of a predetermined length of air which acts as the auxiliary fluid 3. Thereby,
a two-phase fluid 11 is formed.
[0034] Figures 7 and 8 show the formation of the two-phase fluid in the micro channel. Under
the control of the control device, the pump 163 keeps working and the driving mechanism
13 keeps displacing back and forth to repeatedly suck the coating fluid 2a, and then
pull the micro channel 12 out of the through hole 181 to draw in air or a specific
gas, i.e. the auxiliary fluid 3. As a result, the micro channel 12 is filled with
alternating segments of the coating fluid 2a and the auxiliary fluid 3. In other words,
the two-phase fluid 11 is generated in the micro channel 12. In application, the retention
time of the micro channel 12 at the coating fluid supply tank 18 and that of the micro
channel 12 in the air are regulated to control the length of the segments of the coating
fluid 2a and the auxiliary fluid 3.
[0035] In the first embodiment, the auxiliary fluid is a gas. In application, the auxiliary
fluid 3 may comprise a liquid immiscible with the coating fluid 2a. An auxiliary fluid
supply tank (not shown) is provided for supplying the auxiliary fluid.
[0036] The two-phase fluid generating device in Fig. 4 could also be turned 90 degrees counterclockwise,
locating above the coating fluid supply tank 18, and drive the micro channel 12 to
displace up and down, such that the outlet 122 of the micro channel 12 is below or
above the free surface of the coating fluid 2a, and generate the two-phase fluid 11
through the same process mentioned above.
[0037] The first embodiment of the micro patch coating device described above is provided
with only one micro channel therein. In application, a number of micro channels may
be installed in the micro patch coating device for forming a number of parallel micro
patches spaced from each other with a predetermined distance on the substrate at the
same time. For example, Figure 9 is a schematic view showing a micro patch coating
device 200 constructed in accordance with a second embodiment of the present invention.
The second embodiment is similar to the first embodiment and same reference numbers
are used for identical components. The difference between the second embodiment and
the first embodiment is that the micro patch coating device 200 comprises a plurality
of micro channels 12a, 12b, 12c arranged in a line and supported by the supporting
member 14. When the supporting member 14 moves along a horizontal direction I, the
pumping of the pump 163 simultaneously drives the two-phase fluid 11 to flow downward
from the micro channels 12a, 12b, 12c onto the substrate 6, respectively forming parallel
micro patches 7a, 7b, 7c on the substrate 6 at the same time.
[0038] With reference to Figures 10 to 12, a micro patch coating device 300 constructed
in accordance with the present invention is shown. The micro patch coating device
300 comprises a coating die 2 provided with a plurality of coating fluid inlets 21a,
21b, 21c and an auxiliary fluid inlet 22 arranged at specific positions. The coating
fluid inlets 21a, 21b, 21c are used for respectively supplying coating fluids 2a,
2b, 2c into the coating die 2. Each of the coating fluids 2a, 2b, 2c contains a specific
pigment, e.g. blue, green or red color pigment, which is different from each other
and has specific composition. The auxiliary fluid inlet 22 is used for supplying an
auxiliary fluid 3 to the coating die 2. The auxiliary fluid 3 may comprise a single
fluid or a number of different fluids, based on the types of the coating fluids.
[0039] As shown in Figure 11, the coating die 2 is provided with a micro channel structure
4 arranged at an interior of the coating die 2. The bottom of the coating die 2 is
formed with fluid outlets 24. The coating fluid inlets 21a, 21b, 21c and the auxiliary
fluid inlet 22 are connected to the micro channel structure 4, respectively.
[0040] The micro channel structure 4 comprises a plurality of coating fluid buffering sections
211, 212, 213, a plurality of coating fluid passages 21a', 21b', 21c', a plurality
of auxiliary fluid passages 22a, 22b, 22c and a plurality of two-phase fluid output
sections 23a, 23b, 23c.
[0041] Each of the coating fluid buffering sections 211, 212, 213 is connected to a coating
fluid inlet 21a, 21b, 21c. The coating fluid buffering sections 211, 212 and 213 are
arranged between the coating fluid inlets 21a, 21b, 21c and the coating fluid passages
21a', 21b', 21c'. The coating fluids 2a, 2b, 2c are respectively supplied from the
coating fluid inlets 21a, 21b, 21c through the coating fluid buffering sections 211,
212, 213 to the coating fluid passages 21a', 21b', 21c'. The auxiliary fluid passages
22a, 22b, 22c are connected to the auxiliary fluid inlet 22.
[0042] The size of the coating fluid passage 21a', 21b', 21c' is smaller than that of the
coating fluid buffering sections 211, 212, 213 and that of the coating fluid inlets
21a, 21b, 21c. A two-phase fluid generator 5a, 5b, 5c is arranged at a junction between
the coating fluid passage 21a', 21b', 21c' and the corresponding auxiliary fluid passage
22a, 22b, 22c.
[0043] Each of the two-phase fluid output sections 23a, 23b, 23c comprises a two-phase fluid
inlet 231, 232, 233 at one end and a two-phase fluid outlet 24a, 24b, 24c at the other
end. The two-phase fluid inlets 231, 232, 233 are respectively connected to the two-phase
fluid generators 5a, 5b, 5c for conveying the two-phase fluids 11 generated by the
two-phase fluid generators 5a, 5b, 5c. The two-phase fluid outlets 24a, 24b, 24c are
arranged at the bottom of the coating die 2 and kept at a predetermined distance from
the surface of the substrate 6, such that the two-phase fluids 11 flow from the two-phase
fluid output sections 23a, 23b, 23c out through the fluid outlets 24 of the coating
die 2.
[0044] In practical applications, the auxiliary fluid 3 may comprise a liquid or a gas immiscible
with the coating fluids 2a, 2b, 2c. After flowing out of the fluid outlet 24 of the
coating die 2, the two-phase fluid 11 are coated at predetermined locations of the
substrate 6 by the movement of the coating die 2 and the substrate 6 along a parallel
direction relative to each other. In the case a gas is used as the auxiliary fluid,
micro patches 7a, 7b, 7c are directly formed on the substrate. In the case a liquid
that is immiscible with the coating fluids 2a, 2b, 2c is used as the auxiliary fluid
3, the substrate 6 could be heated to vaporize the auxiliary fluid 3 by baking, leaving
the coating fluid 2a, 2b, 2c to form the micro patches 7a, 7b, 7c.
[0045] Please refer to Figure 13 which is a schematic view showing the generation of the
two-phase fluid by the two-phase flow generator of the micro patch coating device.
The two-phase fluid generator 5a is arranged at the junction between the coating fluid
passage 21a' and the auxiliary fluid passage 22a. The two-phase fluid generator 5a
comprises an interceptor 5a1. The interceptor 5a1 may comprise a valve or it can be
a valveless type which is capable to achieve the same functions.
[0046] The coating fluids 2a are delivered through the coating fluid inlet 21 a to the coating
fluid buffering section 211 and then to the coating fluid passage 21 a' . The auxiliary
fluid 3 is delivered from the auxiliary fluid inlet 22 to the auxiliary fluid passage
22a. After a predetermined amount of the coating fluid 2a flows through the interceptor
5a1 to generate a segment 2a' of a predetermined length in the two-phase fluid output
section 23a, the interceptor 5a1 intercepts the flowing of the coating fluid 2a. In
turn, the intercepted 5a1 allows the auxiliary fluid 3 to flow from the auxiliary
fluid passage 22a. After a predetermined amount of the auxiliary fluid 3 flows through
the interceptor 5a1 to generate a segment 3' of a predetermined length in the two-phase
fluid output section 23a, the interceptor 5a1 intercepts the flowing of the coating
fluid 2a. The interception actions of the interceptor 5a1 to the coating fluid flow
and to the auxiliary fluid flow are proceeded alternatively, forming a two-phase fluid
11 in the two-phase fluid output sections 23a. The auxiliary fluid 3 remains immiscible
with the coating fluid 2a.
[0047] In the embodiment mentioned above, the two-phase fluid generators are arranged in
the micro channel structure 4 inside the coating die 2, forming the two-phase fluid.
In practical application, the two-phase fluid generators may be arranged at an exterior
of the coating die 2 for forming the two-phase fluid just as well.
[0048] As shown in Figure 14 which is a schematic view showing a movement of the coating
die driven by a driving mechanism of the micro patch coating device, the coating die
2 of the micro patch coating device 300 is located at a predetermined distance above
the substrate 6. The coating die 2 is driven by a driving mechanism 21 to move back
and forth along a horizontal direction I which is parallel to the substrate 6. Thus,
it allows the coating die 2 to displace relatively to the substrate 6 when performing
the coating procedures. The driving mechanism 21 may comprise a platform conveying
device with adjustable speed that allows the regulation of the displacement velocity
of the coating die 2.
[0049] Please refer to Figure 15. Figure 15 is a schematic view showing a movement of the
substrate driven by a panel driving mechanism of the micro patch coating device. The
substrate 6 is located at a predetermined distance below the coating die 2 of the
coating device 300. The substrate 6 is driven by a panel driving mechanism 6a to move
back and forth along a horizontal direction I which is parallel to the coating die
2. Thus it allows the substrate 6 to displace relatively to the coating die 2 when
performing the coating procedures. The panel driving mechanism 6a may comprise a platform
conveying device with adjustable speed that allows the regulation of the displacement
velocity of the substrate 6.
[0050] Furthermore, both the driving mechanism 21 and the panel driving mechanism 6a may
be used at the same time. The driving mechanism 21 drives the coating die 2 to move
and the panel driving mechanism 6a drives the substrate 6 to move simultaneously along
a horizontal direction I to allow parallel and opposite movements. In this way, the
coating procedure is speeded up for improving the production efficiency. In practical
application, if the auxiliary fluid 3 is a gas, either the coating die 2 or the substrate
6 may be driven to move both in a direction perpendicular to the surface of the substrate
6 of Figure 14 and in a horizontal direction, so as to generate different arrangements
of arrays of pixels.
[0051] Figure 16 is a schematic view showing a coating pattern formed on the substrate and
Figure 17 is a schematic view showing another coating pattern formed on the substrate.
When the two-phase fluids 11 flow out of the fluid outlet 24 of the coating die 2,
the two-phase fluids 11 are coated at predetermined locations on the substrate 6 by
means of the parallel and opposite movements of the coating die 2 and the substrate
6, and form a plurality of micro patches 7a, 7b, 7c. Since the coating fluids 2a,
2b and 2c contains a specific pigment, e.g. blue, green or red color pigment, which
is different from each other and has specific composition, the micro patches 7a, 7b,
7c are formed with the blue, green and red color in a sequence, forming pixels in
the form of rectangular matrix.
[0052] In the case when the auxiliary fluid 3 is a gas, either the coating die 2 and the
substrate 6 can also be arranged to move in a direction perpendicular to the surface
of the substrate 6 of Figure 14, in order to generate different arrangements of arrays
of pixels, as shown in Figure 17.
[0053] Figure 18 is a flow chart for performing a micro patch coating method in accordance
with the present invention. Firstly, a coating die is prepared in step 101. The coating
die comprises a micro channel structure with at least one coating fluid inlet, at
least one auxiliary inlet, at least one two-phase fluid output section and at least
one fluid outlet.
[0054] After the coating die is prepared, a coating fluid is supplied to the micro channel
structure of the coating die from the coating fluid inlet at step 102. An auxiliary
fluid is supplied to the auxiliary fluid inlet of the micro channel structure at step
103.
[0055] The flowing of the coating fluids and the flowing of auxiliary fluid are alternatively
intercepted by a two-phase fluid generator (Step 104), generating a two-phase fluid
comprising a segment of coating fluid of a predetermined length and a segment of auxiliary
fluid of a predetermined length.
[0056] In step 105, the two-phase fluid are conveyed to the two-phase fluid output section,
and then flows through the two-phase fluid outlet of the fluid output section to the
fluid outlet of the coating die at step 106.
[0057] Lastly, the coating die and the substrate are allowed to move in parallel and opposite
direction, allowing the two-phase fluids to flow out of the coating die and coat at
predetermined locations on the substrate, defining micro patches directly at step
107a in the case that the auxiliary fluid is a gas. In the case that the auxiliary
fluid is a liquid immiscible with the coating fluid, the substrate is heated to vaporize
the auxiliary fluid by baking, leaving the coating fluid to define micro patches at
step 107b.
[0058] Figure 19 is a schematic view showing a micro channel structure of a coating die
of a fourth embodiment of the present invention. The fourth embodiment is similar
to the third embodiment and same reference numbers are used for identical components.
The difference between the fourth embodiment and the third embodiment is that the
auxiliary fluid inlet 22 is arranged below the coating fluid inlets 21a, 21b, 21c.
Also, the auxiliary fluid passages 22a, 22b, 22c are arranged below the coating fluid
passages 21a', 21b', 21c'.
[0059] The coating fluid 2a flows from the coating fluid inlet 21a, through the coating
fluid buffering section 211 and the coating fluid passage 21a' to the two-phase fluid
generator 5a. The auxiliary fluid 3 flow from the auxiliary fluid inlet 22 and the
auxiliary fluid passage 22a to the two-phase fluid generator 5a. As shown in Figure
20, the two-phase fluid generator 5a allows the coating fluid 2a and auxiliary fluid
3 to alternatively flow and intercepted. In the two-phase fluid output section 23a,
two-phase fluid 11 is formed. The two-phase fluid 11 flows through the two-phase fluid
outlet 24a of the coating die 2.
1. A method for forming a micro-patch pattern on a substrate,
characterized in that the method comprises the following steps:
(a) preparing at least one two-phase fluid composed of segments of a coating fluid
which alternate sequentially with segments of an auxiliary fluid;
(b) supplying the prepared two-phase fluid into at least one micro channel;
(c) driving the two-phase fluid out of an outlet of the micro channel by a fluid driving
mechanism; and
(d) driving the micro channel and the substrate to move in a movement relative to
each other by a driving mechanism, such that the segments of the two-phase fluid from
the outlet of the micro channel are applied sequentially to the substrate and thereby
the micro-patch pattern is formed by the coating fluid on the substrate.
2. The micro patch coating method as claimed in Claim 1, characterized in that the fluid driving mechanism comprises a pump for pumping the two-phase fluid.
3. The micro patch coating method as claimed in Claim 1,
characterized in that the step (a) further comprises the following steps:
(a) preparing a coating fluid supply tank containing coating fluid, a driving mechanism,
and a fluid driving mechanism;
(b) connecting the micro channel to the driving mechanism and the fluid driving mechanism;
(c) driving the micro channel by the driving mechanism to move in a movement relative
to the coating fluid supply tank; and
(d) drawing the coating fluid in the coating fluid supply tank and the auxiliary fluid
alternately into the micro channel by the fluid driving mechanism, and thereby generating
the two-phase fluid.
4. The micro patch coating method as claimed in Claim 1, characterized in that the auxiliary fluid is a liquid immiscible with the coating fluid.
5. The micro patch coating method as claimed in Claim 1, characterized in that the auxiliary fluid is a gas immiscible with the coating fluid.
6. The micro patch coating method as claimed in Claim 1, characterized in that in step (d), the movement between the micro channel and the substrate is achieved
by displacing the micro channel.
7. The micro patch coating method as claimed in Claim 1, characterized in that in step (d), the movement between the micro channel and the substrate is achieved
by displacing the substrate.
8. The method of claim 1, wherein the coating fluid includes a pigment, and the auxiliary
fluid is a gas, or is a liquid which is vaporized after deposition on the substrate
leaving the coating fluid to form the micro-patch pattern.
9. A micro patch coating device (300), comprising:
a coating die (2);
a micro channel structure (4), which is arranged at an interior of the coating die
(2);
at least one coating fluid inlet (21a), which is connected to the micro channel structure
(4) of the coating die (2) for supplying a coating fluid (2a) to the micro channel
structure (4);
at least one auxiliary fluid inlet (22), which is connected to the micro channel structure
(4) of the coating die (2) and communicated with the coating fluid inlet (21a) via
a junction for supplying an auxiliary fluid (3) to the micro channel structure (4);
at least one two-phase fluid generator (5a), which is connected to a junction of the
coating fluid inlet (21a) and the auxiliary fluid inlet (22) of the micro channel
structure (4) for alternately interrupting the coating fluid (2a) flow and the auxiliary
fluid (3) flow to form a two-phase fluid (11); and
at least one two-phase fluid output section (23a), comprising a two-phase fluid inlet
(231) at one end and a two-phase fluid outlet (24a) at the other end, in which the
two-phase fluid inlet (231) is connected to the two-phase fluid generator (5a) for
conveying the two-phase fluid (11) generated by the two-phase fluid generator (5a)
and the two-phase fluid outlet (24a) is arranged at a bottom of the coating die (2)
which is kept at a predetermined distance from a surface of a substrate (6), for conveying
the two-phase fluid (11) out of the coating die (2);
wherein the two-phase fluid (11) is coated on the substrate (6) at predetermined locations
by means of a movement of the coating die (2) with respect to the substrate (6) and
thereby forming at least one micro patch (7a, 7b, 7c) on the substrate (6).
10. The micro patch coating device (300) as claimed in Claim 9, characterized in that the auxiliary fluid (3) is a liquid or a gas immiscible with the coating fluid (2a,
2b, 2c).
11. The micro patch coating device (300) as claimed in Claim 9, characterized in that the two-phase fluid generator (5a) comprises an interceptor where a segment of predetermined
length of the coating fluid (2a') forms which is interrupted, and then the auxiliary
fluid (3) flows toward the two-phase fluid output section (23a) for a predetermined
length and is interrupted by the coating fluid (2a), the respective fluids alternately
interrupting one another to produce the two-phase flow.
12. The micro patch coating device (300) as claimed in Claim 9, characterized in that the coating die (2) is driven by a driving mechanism (21) to move relatively to the
substrate (6) in a parallel and opposite movement when performing the micro patch
coating procedures.
13. The micro patch coating device (300) as claimed in Claim 12, characterized in that the driving mechanism (21) is a platform conveying device with adjustable speed that
allows the regulation of the relative velocity of the coating die (2).
14. The micro patch coating device (300) as claimed in Claim 9, characterized in that the substrate (6) is driven by a panel driving mechanism (6a) to move relatively
to the coating die (2) in a parallel and opposite movement when performing the micro
patch coating procedures.
15. The micro patch coating device (300) as claimed in Claim 14, characterized in that the panel driving mechanism (6a) is a platform conveying device with an adjustable
speed that allows the regulation of the relative velocity of the substrate (6).
16. The micro patch coating device (300) as claimed in Claim 9, characterized in that the two-phase fluid generator (5a) is a valveless type.
17. The micro patch coating device (300) as claimed in Claim 9, wherein the coating fluid
includes a pigment, and the auxiliary fluid is a gas, or is a liquid which may be
vaporized after deposition on the substrate leaving the coating fluid to form the
micro-patch pattern.
1. Verfahren zum Bilden eines Micropatch-Musters auf einem Substrat,
dadurch gekennzeichnet, dass das Verfahren die folgenden Schritte beinhaltet:
(a) Herstellen von wenigstens einem Zweiphasenfluid, das sich aus Segmenten eines
Beschichtungsfluids zusammensetzt, die sequentiell mit Segmenten eines Zusatzfluids
abwechseln;
(b) Leiten des hergestellten Zweiphasenfluids in wenigstens einen Mikrokanal;
(c) Treiben des Zweiphasenfluids aus einem Auslass des Mikrokanals mit einem Fluidantriebsmechanismus;
und
(d) Inbewegungversetzen des Mikrokanals und des Substrats mit einem Antriebsmechanismus
relativ zueinander, so dass die Segmente des Zweiphasenfluids vom Ausgang des Mikrokanals
sequentiell auf das Substrat aufgebracht werden und dadurch das Micropatch-Muster
von dem Beschichtungsfluid auf dem Substrat gebildet wird.
2. Micropatch-Beschichtungsverfahren nach Anspruch 1, dadurch gekennzeichnet, dass der Fluidantriebsmechanismus eine Pumpe zum Pumpen des Zweiphasenfluids umfasst.
3. Micropatch-Beschichtungsverfahren nach Anspruch 1,
dadurch gekennzeichnet, dass der Schritt (a) ferner die folgenden Schritte beinhaltet:
(a) Bereitstellen eines Beschichtungsfluid-Vorratstanks, der Beschichtungsfluid, einen
Antriebsmechanismus und einen Fluidantriebsmechanismus enthält;
(b) Verbinden des Mikrokanals mit dem Antriebsmechanismus und dem Fluidantriebsmechanismus;
(c) Inbewegungversetzen des Mikrokanals mit dem Antriebsmechanismus relativ zu dem
Beschichtungsfluid-Vorratstank; und
(d) abwechselndes Ziehen des Beschichtungsfluids in dem Beschichtungsfluid-Vorratstank
und des Zusatzfluids mit dem Fluidantriebsmechanismus in den Mikrokanal, um dadurch
das Zweiphasenfluid zu erzeugen.
4. Micropatch-Beschichtungsverfahren nach Anspruch 1, dadurch gekennzeichnet, dass das Zusatzfluid eine mit dem Beschichtungsfluid nicht mischbare Flüssigkeit ist.
5. Micropatch-Beschichtungsverfahren nach Anspruch 1, dadurch gekennzeichnet, dass das Zusatzfluid ein mit dem Beschichtungsfluid nicht mischbares Gas ist.
6. Micropatch-Beschichtungsverfahren nach Anspruch 1, dadurch gekennzeichnet, dass in Schritt (d) die Bewegung zwischen dem Mikrokanal und dem Substrat durch Verschieben
des Mikrokanals erzielt wird.
7. Micropatch-Beschichtungsverfahren nach Anspruch 1, dadurch gekennzeichnet, dass in Schritt (d) die Bewegung zwischen dem Mikrokanal und dem Substrat durch Verschieben
des Substrats erzielt wird.
8. Verfahren nach Anspruch 1, wobei das Beschichtungsfluid ein Pigment enthält und das
Zusatzfluid ein Gas oder eine Flüssigkeit ist, die nach dem Absetzen auf dem Substrat
verdampft, so dass das Beschichtungsfluid zum Bilden des Microatch-Musters zurückbleibt.
9. Micropatch-Beschichtungsvorrichtung (300), die Folgendes umfasst:
eine Beschichtungsdüse (2);
eine Mikrokanalstruktur (4), die im Innern der Beschichtungsdüse (2) angeordnet ist;
wenigstens einen Beschichtungsfluideinlass (21a), der mit der Mikrokanalstruktur (4)
der Beschichtungsdüse (2) verbunden ist, um der Mikrokanalstruktur (4) ein Beschichtungsfluid
(2a) zuzuführen;
wenigstens einen Zusatzfluideinlass (22), der mit der Mikrokanalstruktur (4) der Beschichtungsdüse
(2) verbunden und mit dem Beschichtungsfluideinlass (21a) über einen Übergang zum
Zuführen eines Zusatzfluids (3) zu der Mikrokanalstruktur (4) in Verbindung ist;
wenigstens einen Zweiphasenfluid-Generator (5a), der mit einem Anschluss von Beschichtungsfluideinlass
(21a) und Zusatzfluideinlass (22) der Mikrokanalstruktur (4) verbunden ist, um den
Fluss des Beschichtungsfluids (2a) und den Fluss des Zusatzfluids (3) abwechselnd
zu unterbrechen, um ein Zweiphasenfluid (11) zu bilden; und
wenigstens eine Zweiphasenfluid-Ausgangssektion (23a), die einen Zweiphasenfluideinlass
(231) an einem Ende und einen Zweiphasenfluidauslass (24a) am anderen Ende umfasst,
wobei der Zweiphasenfluideinlass (231) mit dem Zweiphasenfluid-Generator (5a) verbunden
ist, um das vom Zweiphasenfluid-Generator (5a) erzeugte Zweiphasenfluid (11) zu transportieren,
und der Zweiphasenfluid-Auslass (24a) an einem Boden der Beschichtungsdüse (2) angeordnet
ist, die in einem vorbestimmten Abstand von einer Oberfläche eines Substrats (6) gehalten
wird, um das Zweiphasenfluid (11) aus der Beschichtungsdüse (2) hinaus zu transportieren;
wobei das Zweiphasenfluid (11) an vorbestimmten Stellen mittels einer Bewegung der
Beschichtungsdüse (2) mit Bezug auf das Substrat (6) auf dieses aufgebracht wird,
um dadurch wenigstens einen Micropatch (7a, 7b, 7c) auf dem Substrat (6) zu bilden.
10. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 9, dadurch gekennzeichnet, dass das Zusatzfluid (3) ein(e) mit dem Beschichtungsfluid (2a, 2b, 2c) nicht mischbare(s)
Flüssigkeit oder Gas ist.
11. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 9, dadurch gekennzeichnet, dass der Zweiphasenfluid-Generator (5a) einen Abscheider umfasst, wobei ein Segment einer
vorbestimmten Länge des Beschichtungsfluids (2a') entsteht, das unterbrochen wird,
und das Zusatzfluid (3) dann in Richtung auf die Zweiphasenfluid-Ausgangssektion (23a)
für eine vorbestimmte Länge fließt und von dem Beschichtungsfluid (2a) unterbrochen
wird, wobei die jeweiligen Fluide einander abwechselnd unterbrechen, um den Zweiphasenfluss
zu erzeugen.
12. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 9, dadurch gekennzeichnet, dass die Beschichtungsdüse (2) von einem Antriebsmechanismus (21) in eine relative parallele
und entgegengesetzte Bewegung zu dem Substrat (6) versetzt wird, wenn die Micropatch-Beschichtungsvorgänge
durchgeführt werden.
13. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 12, dadurch gekennzeichnet, dass der Antriebsmechanismus (21) eine Plattformtransportvorrichtung mit verstellbarer
Geschwindigkeit ist, die eine Regulierung der relativen Geschwindigkeit der Beschichtungsdüse
(2) zulässt.
14. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 9, dadurch gekennzeichnet, dass das Substrat (6) von einem Plattenantriebsmechanismus (6a) relativ zur Beschichtungsdüse
(2) in eine parallele und entgegengesetzte Bewegung versetzt wird, wenn die Micropatch-Beschichtungsvorgänge
durchgeführt werden.
15. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 14, dadurch gekennzeichnet, dass der Plattenantriebsmechanismus (6a) eine Plattformtransportvorrichtung mit verstellbarer
Geschwindigkeit ist, die eine Regulierung der relativen Geschwindigkeit des Substrats
(6) zulässt.
16. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 9, dadurch gekennzeichnet, dass der Zweiphasenfluid-Generator (5a) vom ventillosen Typ ist.
17. Micropatch-Beschichtungsvorrichtung (300) nach Anspruch 9, wobei das Beschichtungsfluid
ein Pigment aufweist und das Zusatzfluid ein Gas oder eine Flüssigkeit ist, die nach
dem Absetzen auf dem Substrat verdampfen kann, so dass das Beschichtungsfluid zurückbleibt,
um das Micropatch-Muster zu bilden.
1. Procédé permettant de former un motif de micro zones sur un substrat,
caractérisé en ce que le procédé comporte les étapes suivantes consistant à :
(a) préparer au moins un fluide à deux phases composé de segments d'un fluide de revêtement
qui alternent de manière séquentielle avec des segments d'un fluide auxiliaire ;
(b) alimenter le fluide à deux phases préparé dans au moins un micro canal ;
(c) entraîner le fluide à deux phases hors d'une sortie du micro canal par un mécanisme
d'entraînement de fluide ; et
(d) entraîner le micro canal et le substrat à des fins de déplacement en un mouvement
l'un par rapport à l'autre par un mécanisme d'entraînement, de sorte que les segments
du fluide à deux phases en provenance de la sortie du micro canal sont appliqués de
manière séquentielle sur le substrat et de ce fait le motif de micro zones est formé
par le fluide de revêtement sur le substrat.
2. Procédé de revêtement de micro zones selon la revendication 1, caractérisé en ce que le mécanisme d'entraînement de fluide comporte une pompe destinée à pomper le fluide
à deux phases.
3. Procédé de revêtement de micro zones selon la revendication 1,
caractérisé en ce que l'étape (a) comporte par ailleurs les étapes suivantes consistant à :
(a) préparer un réservoir d'alimentation de fluide de revêtement contenant du fluide
de revêtement, un mécanisme d'entraînement, et un mécanisme d'entraînement de fluide
;
(b) connecter le micro canal au mécanisme d'entraînement et au mécanisme d'entraînement
de fluide ;
(c) entraîner le micro canal par le mécanisme d'entraînement à des fins de déplacement
en un mouvement par rapport au réservoir d'alimentation de fluide de revêtement ;
et
(d) aspirer le fluide de revêtement dans le réservoir d'alimentation de fluide de
revêtement et le fluide auxiliaire de manière alternée dans le micro canal par le
mécanisme d'entraînement de fluide, et générer de ce fait le fluide à deux phases.
4. Procédé de revêtement de micro zones selon la revendication 1, caractérisé en ce que le fluide auxiliaire est un liquide non miscible avec le fluide de revêtement.
5. Procédé de revêtement de micro zones selon la revendication 1, caractérisé en ce que le fluide auxiliaire est un gaz non miscible avec le fluide de revêtement.
6. Procédé de revêtement de micro zones selon la revendication 1, caractérisé en ce que, au cours de l'étape (d), le mouvement entre le micro canal et le substrat est réalisé
par le déplacement du micro canal.
7. Procédé de revêtement de micro zones selon la revendication 1, caractérisé en ce que, au cours de l'étape (d), le mouvement entre le micro canal et le substrat est réalisé
par le déplacement du substrat.
8. Procédé selon la revendication 1, dans lequel le fluide de revêtement comprend un
pigment, et le fluide auxiliaire est un gaz, ou est un liquide qui est vaporisé après
dépôt sur le substrat pour laisser le fluide de revêtement afin de former le motif
de micro zones.
9. Dispositif de revêtement de micro zones (300), comportant :
une filière de revêtement (2) ;
une structure de micro canal (4) qui est arrangée au niveau d'un intérieur de la filière
de revêtement (2) ;
au moins une admission de fluide de revêtement (21a), qui est connectée à la structure
de micro canal (4) de la filière de revêtement (2) à des fins d'alimentation d'un
fluide de revêtement (2a) à la structure de micro canal (4) ;
au moins une admission de fluide auxiliaire (22), qui est connectée à la structure
de micro canal (4) de la filière de revêtement (2) et en communication avec l'admission
de fluide de revêtement (21a) par le biais d'une jonction à des fins d'alimentation
d'un fluide auxiliaire (3) à la structure de micro canal (4) ;
au moins un générateur de fluide à deux phases (5a), qui est connecté à une jonction
de l'admission de fluide de revêtement (21a) et de l'admission de fluide auxiliaire
(22) de la structure de micro canal (4) pour interrompre de manière alternée l'écoulement
du fluide de revêtement (2a) et l'écoulement du fluide auxiliaire (3) pour former
un fluide à deux phases (11) ; et
au moins une section de sortie de fluide à deux phases (23a), comportant une admission
de fluide à deux phases (231) au niveau d'une extrémité et une sortie de fluide à
deux phases (24a) au niveau de l'autre extrémité, l'admission de fluide à deux phases
(231) étant connectée au générateur de fluide à deux phases (5a) à des fins de transport
du fluide à deux phases (11) généré par le générateur de fluide à deux phases (5a)
et la sortie de fluide à deux phases (24a) étant arrangée au niveau d'une partie inférieure
de la filière de revêtement (2) que l'on maintient à une distance prédéterminée par
rapport à une surface d'un substrat (6), à des fins de transport du fluide à deux
phases (11) hors de la filière de revêtement (2) ;
dans lequel le fluide à deux phases (11) est revêtu sur le substrat (6) au niveau
d'emplacements prédéterminés au moyen d'un mouvement de la filière de revêtement (2)
par rapport au substrat (6) et former de ce fait au moins une micro zone (7a, 7b,
7c) sur le substrat (6).
10. Dispositif de revêtement de micro zones (300) selon la revendication 9, caractérisé en ce que le fluide auxiliaire (3) est un liquide ou un gaz non miscible avec le fluide de
revêtement (2a, 2b, 2c).
11. Dispositif de revêtement de micro zones (300) selon la revendication 9, caractérisé en ce que le générateur de fluide à deux phases (5a) comporte un intercepteur où un segment
d'une longueur prédéterminée du fluide de revêtement (2a') se forme qui est interrompu,
puis le fluide auxiliaire (3) s'écoule vers la section de sortie de fluide à deux
phases (23a) sur une longueur prédéterminée et est interrompu par le fluide de revêtement
(2a), les fluides respectifs s'interrompant l'un l'autre de manière alternée pour
produire l'écoulement à deux phases.
12. Dispositif de revêtement de micro zones (300) selon la revendication 9, caractérisé en ce que la filière de revêtement (2) est entraînée par un mécanisme d'entraînement (21) à
des fins de déplacement par rapport au substrat (6) en un mouvement parallèle et opposé
lors de la réalisation des procédures de revêtement des micro zones.
13. Dispositif de revêtement de micro zones (300) selon la revendication 12, caractérisé en ce que le mécanisme d'entraînement (21) est un dispositif de transport à plate-forme à vitesse
réglable qui permet la régulation de la vitesse relative de la filière de revêtement
(2).
14. Dispositif de revêtement de micro zones (300) selon la revendication 9, caractérisé en ce que le substrat (6) est entraîné par un mécanisme d'entraînement de panneau (6a) à des
fins de déplacement par rapport à la filière de revêtement (2) en un mouvement parallèle
et opposé lors de la réalisation des procédures de revêtement des micro zones.
15. Dispositif de revêtement de micro zones (300) selon la revendication 14, caractérisé en ce que le mécanisme d'entraînement de panneau (6a) est un dispositif de transport à plate-forme
à vitesse réglable qui permet la régulation de la vitesse relative du substrat (6).
16. Dispositif de revêtement de micro zones (300) selon la revendication 9, caractérisé en ce que le générateur de fluide à deux phases (5a) est du type sans clapet.
17. Dispositif de revêtement de micro zones (300) selon la revendication 9, dans lequel
le fluide de revêtement comprend un pigment, et le fluide auxiliaire est un gaz, ou
est un liquide qui peut être vaporisé après dépôt sur le substrat pour laisser le
fluide de revêtement afin de former le motif de micro zones.