(19)
(11) EP 2 016 621 A1

(12)

(43) Date of publication:
21.01.2009 Bulletin 2009/04

(21) Application number: 07761837.9

(22) Date of filing: 03.05.2007
(51) International Patent Classification (IPC): 
H01L 29/15(2006.01)
H01L 29/786(2006.01)
H01L 29/10(2006.01)
H01L 21/84(2006.01)
H01L 27/12(2006.01)
(86) International application number:
PCT/US2007/068159
(87) International publication number:
WO 2007/131119 (15.11.2007 Gazette 2007/46)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 05.05.2006 US 381835
05.05.2006 US 381850

(71) Applicant: Mears Technologies, Inc.
Waltham, MA 02451 (US)

(72) Inventors:
  • KREPS, Scott, A.
    Waltham, MA 02451 (US)
  • RAO, Kalipatnam, Vivek
    Grafton, Massachusetts 01519 (US)

(74) Representative: Ferreccio, Rinaldo 
c/o Botti & Ferrari S.r.l. Via Locatelli 5
20124 Milano
20124 Milano (IT)

   


(54) SEMICONDUCTOR DEVICE HAVING A SEMICONDUCTOR-ON-INSULATOR CONFIGURATION AND A SUPERLATTICE AND ASSOCIATED METHODS