(19)

(11)

EP 2 021 874 A1

(12)

(43) Date of publication: 11.02.2009 Bulletin 2009/07 (21) Application number: 07744174.9 (22) Date of filing: 21.05.2007

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) (86) International application number: PCT/JP2007/060740 (87) International publication number: WO 2007/136123 (29.11.2007 Gazette 2007/48)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 19.05.2006 US 801866 P (71) Applicant: Nikon Corporation Tokyo 100-8331 (JP)	(72) Inventors: COAKLEY, Scott c/o Nikon Corporation Tokyo 100-8331 (JP) WATSON, Douglas, C. c/o Nikon Corporation Tokyo 100-8331 (JP) NOVAK, W.T. c/o Nikon Corporation Tokyo 100-8331 (JP) PHILLIPS, Alton, H. c/o Nikon Corporation Tokyo 100-8331 (JP) (74) Representative: HOFFMANN EITLE  Patent- und Rechtsanwälte Arabellastrasse 4 81925 München 81925 München (DE)