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(11)

EP 2 022 097 A2

(12)

(43) Date of publication: 11.02.2009 Bulletin 2009/07 (21) Application number: 07809181.6 (22) Date of filing: 24.05.2007

(51) International Patent Classification (IPC):  H01L 31/00(2006.01) H01L 21/762(2006.01) H01L 31/0392(2006.01) H01L 21/84(2006.01) C03C 27/02(2006.01) H01L 31/18(2006.01) (86) International application number: PCT/US2007/012422 (87) International publication number: WO 2007/142865 (13.12.2007 Gazette 2007/50)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 31.05.2006 US 810061 P 28.08.2006 US 511040 28.08.2006 US 511041 (71) Applicant: Corning Incorporated Corning NY 14831 (US)	(72) Inventors: DAWSON-ELLI, David F Shrewsbury, MA 01545 (US) GADKAREE, Kishor P Big Flats, New York 14814 (US) WALTON, Robin M Painted Post, New York 14870 (US) (74) Representative: Boon, Graham Anthony  Elkington and Fife LLP, Prospect House, 8 Pembroke Road Sevenoaks, Kent TN13 1XR Sevenoaks, Kent TN13 1XR (GB)