Method of Poling Piezoelectric Actuator

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(11)

EP 2 023 417 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	13.05.2009 Bulletin 2009/20

(43)	Date of publication A2:
	11.02.2009 Bulletin 2009/07

(21)	Application number: 08151632.0

(22)	Date of filing: 19.02.2008

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International Patent Classification (IPC):

H01L 41/24^(2006.01)

B41J 2/16^(2006.01)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
	Designated Extension States:
	AL BA MK RS

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Priority:

09.07.2007 KR 20070068821

(71)	Applicant: Samsung Electronics Co., Ltd.
	Suwon-si Gyeonggi-do 443-742 (KR)

(72)	Inventors:
	Lim, Seung-mo Gyeonggi-do (KR) Lee, Tae-kyung Gyeonggi-do (KR) Lee, Hwa-sun Gyeonggi-do (KR)

(74)	Representative: Greene, Simon Kenneth
	Elkington and Fife LLP Prospect House 8 Pembroke Road Sevenoaks, Kent TN13 1XR Sevenoaks, Kent TN13 1XR (GB)

(54)	Method of Poling Piezoelectric Actuator

(57) A method of poling a piezoelectric actuator, which can improve the uniformity of a plurality of piezoelectric actuators. In the method, a plurality of piezoelectric actuators are prepared for poling. Then, at least two preliminary poling processes are performed on the prepared piezoelectric actuators under different preliminary voltages and displacements of the piezoelectric actuators subjected to each of the at least two poling processes are measured. A relationship between a voltage and a displacement for each of the piezoelectric actuators is established. Poling voltages are calculated so that the piezoelectric actuators can have the same target displacement. Format poling is performed on the piezoelectric actuators under the calculated poling voltages. The displacements of the piezoelectric actuators, which have completed the formal poling, are measured.

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