(19)
(11)
EP 2 030 221 A1
(12)
(43)
Date of publication:
04.03.2009
Bulletin 2009/10
(21)
Application number:
07730105.9
(22)
Date of filing:
13.06.2007
(51)
International Patent Classification (IPC):
H01J
37/34
(2006.01)
(86)
International application number:
PCT/EP2007/055791
(87)
International publication number:
WO 2007/147757
(
27.12.2007
Gazette 2007/52)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS
(30)
Priority:
19.06.2006
EP 06115659
(71)
Applicant:
Bekaert Advanced Coatings
9800 Deinze (BE)
(72)
Inventors:
VAN DE PUTTE, Ivan
B-8800 Roeselare (BE)
DE BOSSCHER, Wilmert
B-9031 Drongen (BE)
(54)
INSERT PIECE FOR AN END-BLOCK OF A SPUTTERING INSTALLATION