(19)
(11) EP 2 030 221 A1

(12)

(43) Date of publication:
04.03.2009 Bulletin 2009/10

(21) Application number: 07730105.9

(22) Date of filing: 13.06.2007
(51) International Patent Classification (IPC): 
H01J 37/34(2006.01)
(86) International application number:
PCT/EP2007/055791
(87) International publication number:
WO 2007/147757 (27.12.2007 Gazette 2007/52)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 19.06.2006 EP 06115659

(71) Applicant: Bekaert Advanced Coatings
9800 Deinze (BE)

(72) Inventors:
  • VAN DE PUTTE, Ivan
    B-8800 Roeselare (BE)
  • DE BOSSCHER, Wilmert
    B-9031 Drongen (BE)

   


(54) INSERT PIECE FOR AN END-BLOCK OF A SPUTTERING INSTALLATION