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(11)

EP 2 038 208 A1

(12)

(43) Date of publication: 25.03.2009 Bulletin 2009/13 (21) Application number: 07747074.8 (22) Date of filing: 22.06.2007

(51) International Patent Classification (IPC):  B82B 1/00(2006.01) H01L 21/00(2006.01) B82B 3/00(2006.01) G03F 9/00(2006.01) (86) International application number: PCT/KR2007/003043 (87) International publication number: WO 2008/004777 (10.01.2008 Gazette 2008/02)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 07.07.2006 KR 20060063840 (71) Applicant: Korea Institute Of Machinery & Materials Daejeon-City 305-343 (KR)	(72) Inventors: HAN, Chang-Soo Yuseong-ku Daejeon-city 305-750 (KR) SONG, Jin-Won Yuseong-ku Daejeon-city 305-804 (KR) YOON, Yeo-Hwan Youseong-ku Daejeon-city 305-343 (KR) LEE, Eung-Sug Youseong-ku Daejeon-city 305-343 (KR) (74) Representative: Delorme, Nicolas et al Cabinet Germain & Maureau BP 6153 F-69466 Lyon Cedex 06 F-69466 Lyon Cedex 06 (FR)