| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO
SE SI SK TR |
|
Designated Extension States: |
|
AL BA HR MK RS |
| (30) |
Priority: |
03.07.2006 US 806518 P
28.07.2006 US 460864
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara, CA 95054 (US) |
|
| (72) |
Inventors: |
|
- THAKUR, Randhir
Fremont, CA 94539 (US)
- SAMOILOV, Arkadii
Sunnyvale, CA 94087 (US)
- HANSSON, Per-Ove
San Jose, CA 95118 (US)
|
| (74) |
Representative: Zimmermann & Partner |
|
Postfach 330 920
80069 München
80069 München (DE) |
|
