(19)

(11)

EP 2 044 623 A2

(12)

(88) Date of publication A3: 20.03.2008 (43) Date of publication: 08.04.2009 Bulletin 2009/15 (21) Application number: 07840397.9 (22) Date of filing: 12.07.2007

(51) International Patent Classification (IPC):  H01L 21/677(2006.01) C23C 16/00(2006.01) (86) International application number: PCT/US2007/073368 (87) International publication number: WO 2008/011329 (24.01.2008 Gazette 2008/04)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 19.07.2006 US 832248 P 07.02.2007 US 672478 07.02.2007 US 672473 (71) Applicant: Intermolecular, Inc. San Jose CA 95134 (US)	(72) Inventors: CHIANG, Tony, P. San Jose, CA 95134 (US) ENDO, Richard, R. San Jose, CA 95134 (US) TSUNG, James San Jose, CA 95134 (US) (74) Representative: Appelt, Christian W.  Forrester & Boehmert Pettenkoferstrasse 20-22 80336 München 80336 München (DE)