SYSTEM AND METHOD FOR PROCESSING HIGH PURITY MATERIALS - Patent 2046531

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EP 2 046 531 A2

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(88)	Date of publication A3:
	20.03.2008

(43)	Date of publication:
	15.04.2009 Bulletin 2009/16

(21)	Application number: 07810529.3

(22)	Date of filing: 17.07.2007

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International Patent Classification (IPC):

B24B 57/00^(2006.01)
H01L 21/304^(2006.01)

B24B 37/00^(2006.01)

(86)	International application number:
	PCT/US2007/016181

(87)	International publication number:
	WO 2008/011014 (24.01.2008 Gazette 2008/04)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
	Designated Extension States:
	AL BA HR MK RS

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Priority:

17.07.2006 US 831357 P

(71)	Applicant: Celerity, Inc.
	Austin, TX 78729 (US)

(72)	Inventors:
	KANDIYELI, David Mesa, AZ 85208 (US) GRAVES, Todd Winder, GA 30680 (US) YANG, Rhey Jhubei City, Hsinchu County, 302 (TW)

(74)	Representative: Grey, Ian Michael et al
	Venner Shipley LLP 20 Little Britain London EC1A 7DH London EC1A 7DH (GB)

(54)	SYSTEM AND METHOD FOR PROCESSING HIGH PURITY MATERIALS