(19)

(11)

EP 2 050 118 A1

(12)

(43) Date of publication: 22.04.2009 Bulletin 2009/17 (21) Application number: 07768909.9 (22) Date of filing: 13.07.2007

(51) International Patent Classification (IPC):  H01J 37/12(2006.01) H01J 37/063(2006.01) (86) International application number: PCT/NL2007/000180 (87) International publication number: WO 2008/013442 (31.01.2008 Gazette 2008/05)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 25.07.2006 US 833394 P 25.07.2006 NL 1032231 (71) Applicant: Mapper Lithography IP B.V. 2628 XK Delft (NL)	(72) Inventors: KRUIT, Pieter NL-2611 EB Delft (NL) ZHANG, Yanxia NL-2628 XK Delft (NL) VAN BRUGGEN, Martijn, J. NL-2628 XK Delft (NL) STEENBRINK, Stijn, Willem, Herman, Karel NL-2628 XK Delft (NL) (74) Representative: Bras, Pieter et al Octrooibureau Vriesendorp & Gaade B.V. Dr. Kuyperstraat 6 2514 BB Den Haag 2514 BB Den Haag (NL)