(19)

(11)

EP 2 057 683 A2

(12)

(88) Date of publication A3: 02.05.2008 (43) Date of publication: 13.05.2009 Bulletin 2009/20 (21) Application number: 07840799.6 (22) Date of filing: 08.08.2007

(51) International Patent Classification (IPC):  H01L 27/11(2006.01) (86) International application number: PCT/US2007/075520 (87) International publication number: WO 2008/021911 (21.02.2008 Gazette 2008/08)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 08.08.2006 US 836343 P 08.08.2006 US 836437 P 28.08.2006 US 840586 P 27.10.2006 US 855109 P 16.03.2007 US 918388 P (71) Applicant: Nantero, Inc. Woburn, MA 01801 (US)	(72) Inventors: BERTIN, Claude, L. South Burlington, VT 05403 (US) HUANG, X. M., Henry Woburn, MA 01801 (US) RUECKES, Thomas Rockport, MA 01966 (US) SIVARAJAN, Ramesh Shrewsbury, MA 01545 (US) (74) Representative: Benson, Christopher  Harrison Goddard Foote Fountain Precinct Balm Green Sheffield, South Yorkshire S1 2JA Sheffield, South Yorkshire S1 2JA (GB)