(19)
(11) EP 2 059 780 A1

(12)

(43) Date of publication:
20.05.2009 Bulletin 2009/21

(21) Application number: 07837455.0

(22) Date of filing: 28.08.2007
(51) International Patent Classification (IPC): 
G01M 3/20(2006.01)
G01N 33/00(2006.01)
(86) International application number:
PCT/US2007/018962
(87) International publication number:
WO 2008/027411 (06.03.2008 Gazette 2008/10)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 31.08.2006 US 513716

(71) Applicant: Varian, Inc.
Palo Alto, CA 94304 (US)

(72) Inventors:
  • PERKINS, Charles
    Boston, MA 02116 (US)
  • PALENSTYN, Pieter
    Plympton, MA 02367 (US)

(74) Representative: Foster, Mark Charles et al
Mathisen, Macara & Co. The Coach House 6-8 Swakeleys Road
Ickenham, Uxbridge UB10 8BZ
Ickenham, Uxbridge UB10 8BZ (GB)

   


(54) SYSTEM AND METHOD FOR TRACE GAS LEAK DETECTION OF LARGE LEAKS AT RELATIVELY HIGH TEST PRESSURES