| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO
SE SI SK TR |
|
Designated Extension States: |
|
AL BA HR MK RS |
| (30) |
Priority: |
31.08.2006 US 513716
|
| (71) |
Applicant: Varian, Inc. |
|
Palo Alto, CA 94304 (US) |
|
| (72) |
Inventors: |
|
- PERKINS, Charles
Boston, MA 02116 (US)
- PALENSTYN, Pieter
Plympton, MA 02367 (US)
|
| (74) |
Representative: Foster, Mark Charles et al |
|
Mathisen, Macara & Co.
The Coach House
6-8 Swakeleys Road Ickenham, Uxbridge UB10 8BZ Ickenham, Uxbridge UB10 8BZ (GB) |
|