(19)
(11) EP 2 062 287 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
10.03.2021 Bulletin 2021/10

(45) Mention of the grant of the patent:
08.01.2020 Bulletin 2020/02

(21) Application number: 07804779.2

(22) Date of filing: 19.08.2007
(51) International Patent Classification (IPC): 
H01L 21/677(2006.01)
(86) International application number:
PCT/IB2007/002371
(87) International publication number:
WO 2008/023232 (28.02.2008 Gazette 2008/09)

(54)

BUFFER STATION FOR STOCKER SYSTEM

PUFFERSTATION FÜR EIN STOCKER-SYSTEM

STATION TAMPON POUR UN SYSTÈME DE STOCKAGE

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

(30) Priority: 19.08.2006 US 838594 P
25.07.2007 US 881091
25.07.2007 US 881093

(43) Date of publication of application:
27.05.2009 Bulletin 2009/22

(73) Proprietor: Brooks Automation (Germany) GmbH
78315 Radolfzell (DE)

(72) Inventor:
  • REBSTOCK, Lutz
    78315 Radolfzell (DE)

(74) Representative: Kudlek, Franz Thomas et al
m patent group Postfach 33 04 29
80064 München
80064 München (DE)


(56) References cited: : 
JP-A- 2003 182 815
 US-A1- 2002 095 223
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).