(19)

(11)

EP 2 064 738 A1

(12)

(43) Date of publication: 03.06.2009 Bulletin 2009/23 (21) Application number: 07826269.8 (22) Date of filing: 05.09.2007

(51) International Patent Classification (IPC):  H01L 21/768(2006.01) H01L 21/8242(2006.01) (86) International application number: PCT/IB2007/053576 (87) International publication number: WO 2008/029360 (13.03.2008 Gazette 2008/11)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 06.09.2006 EP 06300929 (71) Applicant: NXP B.V. 5656 AE Eindhoven (NL)	(72) Inventor: DE-JONGHE, Véronique NL-5656 AG Eindhoven (NL) (74) Representative: Röggla, Harald  NXP Semiconductors Intellectual Property Department Gutheil-Schoder-Gasse 8-12 1101 Vienna 1101 Vienna (AT)