(19)

(11)

EP 2 064 739 A1

(12)

(43) Date of publication: 03.06.2009 Bulletin 2009/23 (21) Application number: 07869869.3 (22) Date of filing: 24.12.2007

(51) International Patent Classification (IPC):  H01L 21/8247(2006.01) H01L 21/8246(2006.01) H01L 27/115(2006.01) (86) International application number: PCT/US2007/088784 (87) International publication number: WO 2008/083134 (10.07.2008 Gazette 2008/28)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 28.12.2006 US 617593 28.12.2006 US 617598 (71) Applicant: Sandisk Corporation Milpitas, CA 95035 (US)	(72) Inventor: YUAN, Jack, H. Cupertino, CA 95104 (US) (74) Representative: Tothill, John Paul  Frank B. Dehn & Co. St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)