(19)
(11) EP 2 069 639 A2

(12)

(88) Date of publication A3:
17.04.2008

(43) Date of publication:
17.06.2009 Bulletin 2009/25

(21) Application number: 07837449.3

(22) Date of filing: 29.08.2007
(51) International Patent Classification (IPC): 
F04D 17/16(2006.01)
F04D 23/00(2006.01)
F04D 19/04(2006.01)
F04D 29/40(2006.01)
(86) International application number:
PCT/US2007/018929
(87) International publication number:
WO 2008/027388 (06.03.2008 Gazette 2008/10)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK RS

(30) Priority: 31.08.2006 US 513769

(71) Applicant: VARIAN S.p.A.
10040 Leini' (Torino) (IT)

(72) Inventor:
  • HABLANIAN, Marsbed
    Wellesley, MA 02481 (US)

(74) Representative: Foster, Mark Charles et al
Mathisen, Macara & Co. The Coach House 6-8 Swakeleys Road
Ickenham, Uxbridge UB10 8BZ
Ickenham, Uxbridge UB10 8BZ (GB)

   


(54) VACUUM PUMPS WITH IMPROVED PUMPING CHANNEL CROSS SECTIONS