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EP 2 074 649 A2

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(88) Date of publication A3: 03.07.2008 (43) Date of publication: 01.07.2009 Bulletin 2009/27 (21) Application number: 07826550.1 (22) Date of filing: 26.09.2007

(51) International Patent Classification (IPC):  H01L 21/336(2006.01) G11C 16/04(2006.01) H01L 27/115(2006.01) H01L 29/788(2006.01) H01L 29/792(2006.01) H01L 21/8247(2006.01) H01L 21/28(2006.01) (86) International application number: PCT/IB2007/053911 (87) International publication number: WO 2008/038236 (03.04.2008 Gazette 2008/14)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR MK RS (30) Priority: 29.09.2006 EP 06121535 (71) Applicant: NXP B.V. 5656 AG Eindhoven (NL)	(72) Inventors: SLOTBOOM, Michiel 5656 AG Eindhoven (NL) VAN DUUREN, Michiel J. 5656 AG Eindhoven (NL) AKIL, Nader 5656 AG Eindhoven (NL) VAN SCHAIJK, Robertus T.F. 5656 AG Eindhoven (NL) HUERTA, Almudena 5656 AG Eindhoven (NL) (74) Representative: Röggla, Harald et al NXP Semiconductors Intellectual Property Department Gutheil-Schoder-Gasse 8-12 1101 Vienna 1101 Vienna (AT)