(19)
(11) EP 2 076 359 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
16.08.2017 Bulletin 2017/33

(45) Mention of the grant of the patent:
13.07.2016 Bulletin 2016/28

(21) Application number: 07751980.9

(22) Date of filing: 28.02.2007
(51) International Patent Classification (IPC): 
B24B 37/04(2012.01)
(86) International application number:
PCT/US2007/005251
(87) International publication number:
WO 2008/045132 (17.04.2008 Gazette 2008/16)

(54)

STEPPED RETAINING RING

ABGESTUFTER HALTERING

BAGUE DE RETENUE ÉTAGÉE

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 13.10.2006 US 549622

(43) Date of publication of application:
08.07.2009 Bulletin 2009/28

(73) Proprietor: Applied Materials, Inc.
Santa Clara, CA 95054 (US)

(72) Inventors:
  • VAN DER VEEN, Shaun
    San Jose, CA 95117 (US)
  • ZUNIGA, Steven M.
    Soquel, CA 95073 (US)

(74) Representative: Conroy, John et al
Fish & Richardson P.C. Highlight Business Towers Mies-van-der-Rohe-Straße 8
80807 München
80807 München (DE)


(56) References cited: : 
US-A- 5 948 204
 US-A1- 2004 219 870
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).