(19)

(11)

EP 2 082 077 A2

(12)

(88) Date of publication A3: 12.06.2008 (43) Date of publication: 29.07.2009 Bulletin 2009/31 (21) Application number: 07842916.4 (22) Date of filing: 20.09.2007

(51) International Patent Classification (IPC):  C23C 16/00(2006.01) H01L 21/306(2006.01) (86) International application number: PCT/US2007/079084 (87) International publication number: WO 2008/036849 (27.03.2008 Gazette 2008/13)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR (30) Priority: 22.09.2006 US 826718 P 30.11.2006 US 565400 28.08.2007 US 846359 (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)	(72) Inventor: WHITE, John M. Hayward, CA 94541 (US) (74) Representative: Zimmermann & Partner  Postfach 330 920 80069 München 80069 München (DE)