Mechanical polishing pad and chemical mechanical polishing method

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EP 2 083 027 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 1 (W1 B1)

(48)	Corrigendum issued on:
	16.05.2012 Bulletin 2012/20

(45)	Mention of the grant of the patent:
	14.03.2012 Bulletin 2012/11

(21)	Application number: 09151113.9

(22)	Date of filing: 22.01.2009

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International Patent Classification (IPC):

C08G 18/32^(2006.01)
C08G 18/48^(2006.01)
C08G 18/67^(2006.01)
C08L 75/16^(2006.01)
C08F 299/06^(2006.01)

C08G 18/44^(2006.01)
C08G 18/66^(2006.01)
C08G 18/69^(2006.01)
B24B 37/00^(2012.01)

(54)	Mechanical polishing pad and chemical mechanical polishing method Chemisch mechanisches Polierkissen und chemisch mechanisches Polierverfahren Procédé de polissage chimico-mécanique

(84)	Designated Contracting States:
	DE FR IT

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Priority:

24.01.2008 JP 2008014115
22.05.2008 JP 2008134238

(43)	Date of publication of application:
	29.07.2009 Bulletin 2009/31

(73)	Proprietor: JSR Corporation
	Minato-ku, Tokyo 105-8640 (JP)

(72)	Inventors:
	Kuwabara, Rikimaru Minato-ku, Tokyo 1058640 (JP) Okamoto, Takahiro Minato-ku, Tokyo 1058640 (JP) Hosaka, Yukio Minato-ku, Tokyo 1058640 (JP) Shimizu, Takafumi Minato-ku, Tokyo 1058640 (JP) Watanabe, Tsuyoshi Minato-ku, Tokyo 1058640 (JP)

(74)	Representative: TBK
	Bavariaring 4-6 80336 München 80336 München (DE)

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References cited: :

EP-A- 0 309 249
US-A- 4 447 563

EP-A- 1 002 817
US-A1- 2006 148 391

Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).