| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO
SE SI SK TR |
| (30) |
Priority: |
05.12.2006 US 868720 P
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara, CA 95054 (US) |
|
| (72) |
Inventors: |
|
- LOLDJ, Youssef A.
Sunnyvale, CA 94087 (US)
- GELO, Miroslav
San Jose, CA 95136 (US)
- DIAZ, Manuel
San Jose, CA 95118 (US)
- CRAWFORD, Shaun
San Ramon, CA 94583 (US)
|
| (74) |
Representative: Peterreins, Frank |
|
Fish & Richardson P.C.
Highlight BusinessTowers
Mies-van-der-Rohe-Strasse 8
80807 München
80807 München (DE) |
|
