(19)

(11)

EP 2 089 311 A2

(12)

(88) Date of publication A3: 19.06.2008 (43) Date of publication: 19.08.2009 Bulletin 2009/34 (21) Application number: 07847091.1 (22) Date of filing: 31.10.2007

(51) International Patent Classification (IPC):  B81C 1/00(2006.01) (86) International application number: PCT/EP2007/061731 (87) International publication number: WO 2008/053008 (08.05.2008 Gazette 2008/19)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR (30) Priority: 31.10.2006 US 863679 P 26.10.2007 WO PCT/EP2007/061558 (71) Applicants: IMEC 3001 Leuven (BE) ASML Netherlands B.V. 5504 DR Veldhoven (NL)	(72) Inventors: WITVROUW, Ann 3020 Herent (BE) HASPESLAGH, Luc 3210 Lubbeek-linden (BE) (74) Representative: Bird, William Edward et al Bird Goën & Co. Klein Dalenstraat 42A 3020 Winksele 3020 Winksele (BE)