(19)
(11) EP 2 092 307 A1

(12)

(43) Date of publication:
26.08.2009 Bulletin 2009/35

(21) Application number: 07849347.5

(22) Date of filing: 06.12.2007
(51) International Patent Classification (IPC): 
G01N 21/47(2006.01)
H01L 31/105(2006.01)
G01N 33/552(2006.01)
H01L 29/06(2006.01)
G01N 33/551(2006.01)
(86) International application number:
PCT/IB2007/054937
(87) International publication number:
WO 2008/068721 (12.06.2008 Gazette 2008/24)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

(30) Priority: 08.12.2006 EP 06125723

(71) Applicant: Koninklijke Philips Electronics N.V.
5621 BA Eindhoven (NL)

(72) Inventors:
  • KAHYA, Neriman N.
    5656 AE Eindhoven (NL)
  • BAKKERS, Erik P. A. M.
    5656 AE Eindhoven (NL)
  • STEFFEN, Thomas
    5656 AE Eindhoven (NL)
  • BORGSTROM, Lars M.
    5656 AE Eindhoven (NL)

(74) Representative: Van Velzen, Maaike Mathilde 
Philips Intellectual Property & Standards P.O. Box 220
5600 AE Eindhoven
5600 AE Eindhoven (NL)

   


(54) SEMICONDUCTOR SENSOR DEVICE, DIAGNOSTIC INSTRUMENT COMPRISING SUCH A DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE