(19)
(11) EP 2 095 426 A2

(12)

(88) Date of publication A3:
21.08.2008

(43) Date of publication:
02.09.2009 Bulletin 2009/36

(21) Application number: 07861100.1

(22) Date of filing: 22.12.2007
(51) International Patent Classification (IPC): 
H01L 29/06(2006.01)
H01L 21/205(2006.01)
 B82B 1/00(2006.01)
(86) International application number:
PCT/SE2007/001171
(87) International publication number:
WO 2008/079077 (03.07.2008 Gazette 2008/27)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

(30) Priority: 22.12.2006 SE 0602840
12.01.2007 SE 0700102
15.06.2007 US 812226
26.10.2007 SE 0702404

(71) Applicant: QuNano AB
223 70 Lund (SE)

(72) Inventors:
  • SVENSSON, Patrik
    S-224 79 Lund (SE)
  • OHLSSON, Jonas
    S-212 13 Malmö (SE)
  • SAMUELSON, Lars
    S-217 74 Malmö (SE)
  • LÖWGREN, Truls
    S-212 13 Malmö (SE)
  • MARTYNOV, Yourii
    S-224 68 Lund (SE)

(74) Representative: Franks, Barry Gerard 
BRANN AB Uppsala Office Box 171 92
104 62 Stockholm
104 62 Stockholm (SE)

   


(54) NANOELECTRONIC STRUCTURE AND METHOD OF PRODUCING SUCH